# US 12,216,142 B2 · Current sensing resistors and method of manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,216,142 B2 - Document ID: US12216142B2 - Status: Granted - Kind: B2 - Application number: 17/811,874 - Filed: 2022-07-11 - Published: 2023-09-07 - Granted: 2025-02-04 - Earliest claimed: 2022-03-01 - Assignees: Yageo Corporation - Applicants: Yageo Corporation - Inventors: Shen-Li Hsiao; Hwan-Wen Lee - Web page: https://patentgrep.com/patent/US12216142B2 ## CPC - G01R 1/203: {Resistors used for electric measuring, e.g. decade resistors standards, resistors for comparators, series resistors, shunts (resistors in general H01C; microwave or radiowave terminations H01P1/26; coupling devices H01R)} - G01R 19/0092: {Measuring current only} - H01C 1/14: Terminals or tapping points specially adapted for resistors; Arrangements of terminals or tapping points on resistors - H01C 7/06: including means to minimise changes in resistance with changes in temperature - H01C 17/00: Apparatus or processes specially adapted for manufacturing resistors (providing fillings for housings or enclosures H01C1/02; reducing insulation surrounding a resistor to powder H01C1/03; manufacture of thermally variable resistors H01C7/02, H01C7/04) - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - H01C: RESISTORS ## Abstract Current sensing resistors and a method of manufacturing the same are disclosed in the present invention. A composite material is firstly provided in the method. Then, a first portion of an alloy substrate of the composite material is removed along a first direction to form a plurality of first trenches. Next, a second portion of the alloy substrate of the composite material is removed along a second direction to form a plurality of second trenches, and a third portion of the alloy substrate of the composite material is further removed along the first direction to form the current sensing resistors. The current sensing resistors with small dimensions and an extremely low temperature coefficient of resistance can be produced rapidly by the method of the present invention. ## Claims ### Claim 1 A method of manufacturing current sensing resistors, comprising: providing a composite material, wherein the composite material comprises an insulating layer and an alloy substrate disposed on the insulating layer, and a temperature coefficient of resistance of the alloy substrate is lower than 50 ppm/° C.; removing a first portion of the alloy substrate of the composite material along a first direction to form a plurality of first trenches on an upper surface of the alloy substrate; removing a second portion of the alloy substrate of the composite material along a second direction to form a plurality of second trenches, wherein the insulating layer is exposed by the plurality of second trenches, and the second direction is not parallel to the first direction; and removing a third portion of the alloy substrate along the first direction to form a plurality of third trenches and a plurality of resistive elements after forming the plurality of second trenches, wherein the insulating layer is exposed by the plurality of third trenches, each of the third trenches is disposed between adjacent two of the first trenches, and the plurality of resistive elements are arranged in an array on the insulating layer. ### Claim 2 (depends on 1) The method of claim 1, wherein the alloy substrate has a thickness smaller than 0.5 mm. ### Claim 3 (depends on 1) The method of claim 1, wherein the alloy substrate comprises CuMnSn or CuMnNi. ### Claim 4 (depends on 1) The method of claim 1, further comprising removing a portion of a bottom surface of each of the first trenches after forming the resistive elements. ### Claim 5 (depends on 1) The method of claim 1, wherein an aspect ratio of each of the first trenches is 0.1 to 0.35, respectively. ### Claim 6 (depends on 1) The method of claim 1, wherein the first direction is perpendicular to the second direction. ### Claim 7 (depends on 1) The method of claim 1, wherein removing the first, the second, and the third portion of the alloy substrate includes dicing or scraping the surface of the alloy substrate. ### Claim 8 (depends on 1) The method of claim 1, wherein the insulating layer is bonded with the alloy layer by binders. ### Claim 9 (depends on 1) The method of claim 1, wherein an insulating material is coated on the alloy substrate to form the insulating layer. ### Claim 10 (depends on 1) The method of claim 1, wherein an alloy material is deposited on the insulating layer to form the alloy substrate. ### Claim 11 (depends on 1) The method of claim 1, further comprising filling a protective material into each of the first trenches to form a protective layer after forming the plurality of third trenches. ### Claim 12 (depends on 11) The method of claim 11, further comprising separating each of the resistive elements to obtain the current sensing resistors after forming the protective layer. ### Claim 13 (depends on 12) The method of claim 12, further comprising forming an alloy layer on each of the current sensing resistors. ### Claim 14 (depends on 1) A current sensing resistor manufactured by the method of claim 1, wherein a long side of the current sensing resistor is smaller than 1.8 mm, and the current sensing resistor has a temperature coefficient of resistance lower than 50 ppm/° C.