# US 12,216,042 B2 · Photoacoustic detecting device

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- Number: US 12,216,042 B2
- Document ID: US12216042B2
- Status: Granted
- Kind: B2
- Application number: 18/641,107
- Filed: 2024-04-19
- Published: 2024-10-24
- Granted: 2025-02-04
- Earliest claimed: 2023-04-20
- Assignees: Eclypia; Commissariat A L'energie Atomique Et Aux Energies Alternatives
- Applicants: Eclypia; Commissariat A L'energie Atomique Et Aux Energies Alternatives
- Inventors: Rolf Aidam; Sébastien Barnola; Badhise Ben Bakir; Jean-Guillaume Coutard; Kevin Jourde
- Web page: https://patentgrep.com/patent/US12216042B2

## CPC

- G01N 21/1702: {with opto-acoustic detection, e.g. for gases or analysing solids}
- A61B 5/0095: {by applying light and detecting acoustic waves, i.e. photoacoustic measurements}
- A61B 5/145: Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value {; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid or cerebral tissue} (non-radiation detecting or locating of foreign bodies in blood A61B5/06)
- A61B 5/14532: {for measuring glucose, e.g. by tissue impedance measurement}
- G01N 29/2418: {using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046)}
- G01N 29/2425: {optoacoustic fluid cells therefor}
- G01N 2021/1706: {in solids}
- G01N 2201/0612: Laser diodes
- G01N 2201/0633: Directed, collimated illumination
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)

## Abstract

A photoacoustic detecting device comprises a housing which houses: a lighting module, a photoacoustic cell, comprising an surface contact intended to be placed in contact with the medium to analyse, a photoacoustic cavity extending from the surface contact to a top of the photoacoustic cell, at least one window closing the top of the photoacoustic cell or the contact surface of the photoacoustic cell, at least one subwavelength pattern located on a surface of said window, said subwavelength pattern being configured to focus the light beam on an surface of interest of the medium to analyse, a sensor, linked to the cavity, the sensor being configured to detect a generated signal, said generated signal being generated in the photoacoustic cavity by a photothermic effect in the medium, and wherein the photoacoustic cell, the window and the subwavelength pattern are formed on a single silicon wafer.

## Claims

### Claim 1

A photoacoustic detecting device for measuring a parameter of interest in a medium to analyse, the photoacoustic detecting device comprising:
a housing comprising a cover and a baseplate, wherein the baseplate comprises an aperture, said housing being configured to house:
at least one lighting module configured to emit at least one light beam,
a photoacoustic cell, comprising a contact surface accessible from the aperture of the baseplate, said contact surface being intended to be placed in contact with the medium to analyse, the photoacoustic cell further comprising a photoacoustic cavity extending from the contact surface to a top of the photoacoustic cell, wherein said top and said surface contact are open,
at least one window closing the top of the photoacoustic cell or the contact surface of the photoacoustic cell,
at least one subwavelength pattern located on a surface of said window, said subwavelength pattern being configured to focus the light beam on a surface of interest of the medium to analyse,
a sensor, linked to the photoacoustic cavity, the sensor being configured to detect a generated signal, said generated signal being generated in the photoacoustic cavity by a photothermic effect in the medium to analyse in response to the irradiation of said medium by the light beam, and
wherein the photoacoustic cell, the window and the subwavelength pattern are formed on a single silicon wafer.

### Claim 2 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein a top surface of the window comprises a subwavelength pattern and a bottom surface of said window comprises another subwavelength pattern.

### Claim 3 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein the window is a first window, said photoacoustic detecting device further comprising a second window, wherein the second window is configured to:
close the top of the photoacoustic cell if the first window closes the contact surface of the photoacoustic cell, or,
close the contact surface of the photoacoustic cell if the first window closes the top of the photoacoustic cell, wherein
a surface of said second window comprises a subwavelength pattern.

### Claim 4 (depends on 3)

The photoacoustic detecting device according to claim 3, wherein a top surface of the second window comprises a subwavelength pattern and a bottom surface of the second window comprises another subwavelength pattern.

### Claim 5 (depends on 1)

The photoacoustic detecting device according to claim 1, comprising a plurality of lighting modules, each being configured to emit a light beam, wherein the at least one subwavelength pattern is further configured to collimate the light beams emitted by each of the lighting modules.

### Claim 6 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein a surface of a window, said surface not comprising a subwavelength pattern, comprises antireflective properties.

### Claim 7 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein the at least one lighting module comprises a quantum cascade laser configured to emit a light beam in the mid infrared wavelength.

### Claim 8 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein the at least one lighting module is configured to be placed perpendicularly to a plane defined by the window.

### Claim 9 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein the at least one lighting module is configured to be placed in parallel with a plane defined by the window.

### Claim 10 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein said subwavelength pattern(s) further comprise anti reflective properties regarding a wavelength of the light beam.

### Claim 11 (depends on 1)

The photoacoustic detecting device according to claim 1, wherein a pattern of the subwavelength pattern is either period or non-periodic.
