Liquid shaping with charged particle beams
AssigneeFEI Company
InventorsLibor Novak, Tomas Kazda
Life of this patent
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Abstract
The present invention relates to a method for preparing and/or processing a sample. The sample comprises at least one fluid, and the method comprises directing a charged particle beam onto the at least one fluid and causing the at least one fluid to flow in response to the charged particle beam being directed on to it. The present invention also relates to a system and a computer program product used to carry out the method.
Claims18
A method for preparing and/or processing a sample, wherein:
- the sample comprises at least one fluid and a plurality of conducting elements;
- and
- the method comprises:
- directing a charged particle beam onto the at least one fluid and causing the at least one fluid to flow in response to the charged particle beam being directed on to it, and
- performing a lift-out step wherein the lift-out step comprises milling and removing the plurality of conducting elements from a plurality of corresponding bulk samples.
A system comprising a scanning microscope system and a data processing system including a data storage component storing a computer program product, wherein the system is configured for preparing and/or processing a sample, wherein the sample comprises at least one fluid and a plurality of conducting elements, the data processing system being configured to execute the computer program product to cause the system to:
- direct a charged particle beam onto the at least one fluid causing the at least one fluid to flow in response to the charged particle beam being directed on to it, and
- perform a lift-out step wherein the lift-out step comprises milling and removing the plurality of conducting elements from a plurality of corresponding bulk samples.
Non-transitory computer readable instructions that, when run on a data processing system, causes a scanning microscope system containing a sample that comprises at least one fluid and a plurality of conducting elements to:
- direct a charged particle beam onto the at least one fluid causing the at least one fluid to flow in response to the charged particle beam being directed on to it;
- and
- perform a lift-out step wherein the lift-out step comprises milling and removing the plurality of conducting elements from a plurality of corresponding bulk samples.
Dependencies are inferred from the claim text.