US 12,216,026 B2 · Low power memristive vacuum sensor

Abstract

Techniques for measuring vacuum pressure using a memristor element are described. A vacuum sensor can include a memristor element having a semiconductor substrate, a memristive material layer, and a conductive electrode. The off-state resistance of the memristor element can be sensitive to changes in ambient pressure at the element. The off-state resistance of the memristor element may also exhibit a well-defined increase at pressures below a threshold pressure. Measurement of the off-state resistance may be obtained with low power consumption and without changing the resistance or switching the state of the memristor element. The measurements may be used to both determine a leak rate of the ambient pressure within the volume of interest and determine if the sensor is exposed to vacuum pressure below the threshold pressure.

Claims18

Dependent claims

A pressure detection system comprising:

a vacuum sensor comprising:
a substrate;
an oxide layer coupled to the substrate;
and
a conductive top electrode coupled to the oxide layer;
an indicator;
a controller electrically coupled to the vacuum sensor and the indicator, the controller configured to at least:
provide a readout signal to the vacuum sensor;
detect an output signal from the vacuum sensor, the output signal generated in response to the readout signal and corresponding to a resistance across the vacuum sensor measured from the conductive top electrode to the substrate;
and
send an indication signal to the indicator, the indication signal corresponding to a level of the output signal, the level of the output signal associated with a pressure at the vacuum sensor.

8 more elements

Dependencies are inferred from the claim text.

Low power memristive vacuum sensor

Life of this patent

Low power memristive vacuum sensor

Life of this patent

Abstract

Claims18