# US 12,216,017 B2 · Compliant tri-axial force sensor and method of fabricating the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,216,017 B2 - Document ID: US12216017B2 - Status: Granted - Kind: B2 - Application number: 17/629,663 - Filed: 2020-07-22 - Published: 2022-08-11 - Granted: 2025-02-04 - Earliest claimed: 2019-07-24 - Assignees: Touchlab Limited - Applicants: Touchlab Limited - Inventors: Zakareya Hussein - Web page: https://patentgrep.com/patent/US12216017B2 ## CPC - G01L 5/162: of piezoresistors - G01L 5/228: {using tactile array force sensors} - G01L 1/18: using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material - G01L 5/009: {Force sensors associated with material gripping devices} - G01L 5/16: for measuring several components of force - A61B 2562/0252: Load cells - A61B 2562/0285: Nanoscale sensors - A61B 2562/046: in a matrix array - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) ## Abstract A compliant tri-axial force sensor is disclosed that may be incorporated into soft robots or electronic skin. The sensor comprises a first electrode layer including column electrodes in a first orientation; a second electrode layer including column electrodes in a second orientation that is orthogonal to the first orientation; a force-dependent active layer provided between the first electrode layer and the second electrode layer configured to change at least one property—such as quantum tunneling, conductivity, resistivity, or electrical charge—when subjected to a force; at least one three dimensional bump arranged to transmit externally applied force through the active layer; and at least one spacer arranged to maintain a separation between two or more layers in the sensor until an external force is applied. ## Claims ### Claim 1 A compliant tri-axial force sensor comprising: a first electrode layer having an array of column electrodes in a first orientation; a second electrode layer having an array of column electrodes in a second orientation, which is orthogonal to the first orientation; a force-dependent active layer which is configured to change at least one property when subjected to a force and which is provided between the first electrode layer and the second electrode layer; at least one three dimensional bump arranged to transmit externally applied force through the force-dependent active layer; wherein at least one spacer is provided which is arranged to maintain a separation between two or more layers in the compliant tri-axial force sensor until an external force is applied; and wherein the at least one spacer takes the form of a binder provided between the force-dependent active layer and the first and/or second electrode layer, wherein the binder is provided in gaps between adjacent column electrodes and extends between the force-dependent active layer and respective edges of said adjacent column electrodes; or wherein the force-dependent active layer comprises a first active layer and a second active layer with a gap there-between, and wherein the at least one spacer is provided within the force-dependent active layer. ### Claim 2 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the force-dependent active layer comprises at least one of: a quantum tunneling material, a piezoresistive material or a piezoelectric material. ### Claim 3 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one property is: quantum tunnelling; conductivity; resistivity or electrical charge. ### Claim 4 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one three dimensional bump has a footprint which extends at least partially over at least two column electrodes in the first electrode layer and at least partially over at least two column electrodes in the second electrode layer such that forces applied to the at least one three dimensional bump are transmittable through the force-dependent active layer in at least four discrete regions. ### Claim 5 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one three dimensional bump has a footprint contained within a space between two adjacent column electrodes in the first electrode layer and between two adjacent column electrodes in the second electrode layer. ### Claim 6 (depends on 1) The compliant tri-axial force sensor according to claim 1 further comprising one or more of: a base layer below the first electrode layer; a top layer above the second electrode layer; a first carbon layer between the first electrode layer and the force-dependent active layer; a second carbon layer between the second electrode layer and the force-dependent active layer; and a cover layer over the at least one three dimensional bump; optionally, wherein the first and/or second carbon layer is continuous across multiple column electrodes in the first and/or second electrode layer. ### Claim 7 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one spacer is provided between a base layer and a top layer; or on or through the first or second electrode layer; and/or wherein the at least one spacer is in the form of a dot, a column, a post, a cylinder, a tubular, a pyramid, or a mesh; and/or wherein the at least one spacer has a solid or hollow transverse cross-section in the form of a circle, square, rectangle, diamond, pentagon, hexagon, or honeycomb lattice. ### Claim 8 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one spacer comprises an array of said spacers; optionally, wherein the spacers in the array have a plurality of different dimensions. ### Claim 9 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the force-dependent active layer forms a continuous layer across multiple column electrodes in the first and/or second electrode layer; or wherein the force-dependent active layer forms a discontinuous layer across the column electrodes in the first and/or second electrode layer. ### Claim 10 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein an insulator is provided between adjacent electrodes in the first and/or second electrode layer. ### Claim 11 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein an adhesive layer is provided between one or more adjacent layers. ### Claim 12 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one three dimensional bump comprises a polymer having a different elasticity to a remainder of the compliant tri-axial force sensor. ### Claim 13 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one three dimensional bump is in the form of a mesa, dome, hemisphere, hemispherical section, cone, cone section, cuboid, cylinder, half-cylinder, pyramid, pyramid section, tetrahedron, tetrahedron section, hexahedron, triangular prism, or polyhedron. ### Claim 14 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one three dimensional bump has a height that is at least twice a height of a remainder of the compliant tri-axial force sensor. ### Claim 15 (depends on 1) The compliant tri-axial force sensor according to claim 1 wherein the at least one three dimensional bump comprises an array of said three dimensional bumps.