# US 12,216,013 B2 · Miniature pressure/force sensor with integrated leads

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- Number: US 12,216,013 B2
- Document ID: US12216013B2
- Status: Granted
- Kind: B2
- Application number: 18/388,473
- Filed: 2023-11-09
- Published: 2024-02-29
- Granted: 2025-02-04
- Earliest claimed: 2016-02-03
- Assignees: Hutchinson Technology Incorporated
- Applicants: Hutchinson Technology Incorporated
- Inventors: Michael W. Davis; Peter F. Ladwig; Matthew S. Lang; Dean E. Myers; Clark T. Olsen; Douglas P. Riemer
- Web page: https://patentgrep.com/patent/US12216013B2

## CPC

- G01L 1/2268: {Arrangements for correcting or for compensating unwanted effects}
- G01L 1/146: {for measuring force distributions, e.g. using force arrays (G01L1/148 takes precedence)}
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly comprising a common insulating layer and a common conductor layer on the insulating layer. The conductor layer includes at least a portion of the sensing element and at least the first trace.

## Claims

### Claim 1

A capacitive pressure sensor, comprising:
a first trace assembly, including:
a spring metal diaphragm including a base portion and a moving portion;
an insulating layer including a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm; and
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and
a second trace assembly joined to the first trace assembly, including:
a diaphragm including a base;
an insulating layer having a diaphragm portion on the diaphragm and a lead portion extending from the diaphragm; and
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion.

### Claim 2 (depends on 1)

The pressure sensor of claim 1 wherein the base portion of the first trace assembly is joined to the base portion of the second trace assembly.

### Claim 3 (depends on 1)

The pressure sensor of claim 1 and further including a spacer, and wherein the base portions of the first and second trace assemblies are joined to the spacer.

### Claim 4 (depends on 1)

The pressure sensor of claim 1 wherein the spring metal diaphragm includes a plurality of arms coupling the moving portion to the base portion.

### Claim 5

A capacitive pressure sensor, comprising:
a trace assembly, including:
a spring metal diaphragm including a base portion and a moving portion;
an insulating layer having a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm;
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and
a metal can electrically and mechanically connected to the base portion of the spring metal diaphragm and defining a void adjacent the moving portion of the spring metal diaphragm.

### Claim 6

A capacitive pressure sensor, comprising:
an insulating layer including a diaphragm portion, a lead portion, and first and second opposite sides;
a conductor layer on the first side of the insulating layer including:
an electrode on the diaphragm portion;
a first trace extending from the electrode on the lead portion; and
a second trace on the lead portion;
a metal spacer member on the second side of the insulating layer around the electrode;
a conductive via electrically connecting the second trace to the metal spacer member; and
a metal electrode member mechanically and electrically joined to the metal spacer member.