# US 12,215,989 B2 · Differential-pressure-based flow meters > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,215,989 B2 - Document ID: US12215989B2 - Status: Granted - Kind: B2 - Application number: 17/424,159 - Filed: 2020-01-17 - Published: 2022-04-07 - Granted: 2025-02-04 - Earliest claimed: 2019-01-25 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: John Folden Stumpf; Karl Frederick Leeser - Web page: https://patentgrep.com/patent/US12215989B2 ## CPC - G01F 1/363: {with electrical or electro-mechanical indication (G01F1/37 and G01F1/38 take precedence)} - G01F 1/40: Details of construction of the flow constriction devices - G01F 1/42: Orifices or nozzles - G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME ## Abstract Various embodiments include apparatuses and methods to form the apparatus. In one embodiment, the apparatus is a flow meter having inlet and outlet portions for transporting a fluid along a flow path. A flow-restrictor element is formed within the flow path to impart a pressure drop to the fluid. A flow sensor has a first surface of the flow sensor in direct fluid communication with fluid flowing upstream of the flow-restrictor element and a second surface, on a portion of the flow sensor opposite to the first surface, in direct fluid communication with fluid flowing downstream of the flow-restrictor element. The flow sensor senses a differential pressure in the fluid due to the at least one flow-restrictor element. Other apparatuses and systems are disclosed. ## Claims ### Claim 1 A flow meter, comprising: a flow path having an inlet portion and an outlet portion and configured to transport a fluid, the inlet portion and the outlet portion of the flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the inlet portion and the outlet portion; at least one flow-restrictor element within the flow path and arranged between the inlet portion and the outlet portion of the flow path and configured to impart a pressure drop to the fluid; and a flow sensor arranged between the inlet portion and the outlet portion of the flow path, a first surface of the flow sensor is configured to be in direct fluid communication with the fluid that is flowing upstream of the at least one flow-restrictor element, a second surface on a portion of the flow sensor opposite to the first surface of the flow sensor is configured to be in direct fluid communication with the fluid that is flowing downstream of the at least one flow-restrictor element, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one flow-restrictor element. ### Claim 2 (depends on 1) The flow meter of claim 1, wherein the at least one flow-restrictor element comprises a laminar flow element. ### Claim 3 (depends on 1) The flow meter of claim 1, wherein the at least one flow-restrictor element comprises an orifice. ### Claim 4 (depends on 1) The flow meter of claim 1, wherein the at least one flow-restrictor element comprises a plurality of orifices. ### Claim 5 (depends on 1) The flow meter of claim 1, wherein the inlet portion and the outlet portion of the flow path are arranged at angles that are about 0° to about 45° apart. ### Claim 6 (depends on 1) The flow meter of claim 1, wherein the inlet portion and the outlet portion of the flow path are arranged at angles that are about 45° to about 60° apart. ### Claim 7 (depends on 1) The flow meter of claim 1, further comprising a first bend in the flow path that is upstream to the at least one flow-restrictor element and a second bend that is downstream from the at least one flow-restrictor element. ### Claim 8 (depends on 7) The flow meter of claim 7, wherein at least one of the first bend and the second bend are at least five-to-seven characteristic linear dimensions away from the at least one flow-restrictor element, the characteristic linear dimension being based on an internal dimension of the flow path. ### Claim 9 (depends on 1) The flow meter of claim 1, wherein the flow sensor is a differential pressure sensor. ### Claim 10 (depends on 1) The flow meter of claim 1, wherein a turndown ratio of the flow meter is at least about 100:1. ### Claim 11 A flow meter, comprising: a flow path having an inlet portion and an outlet portion and configured to transport a fluid, the flow path having a single bend formed therein, the inlet portion and the outlet portion of the flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the inlet portion and the outlet portion; at least one flow-restrictor element within the flow path and arranged between the inlet portion and the outlet portion of the flow path and configured to impart a pressure drop to the fluid; and at least one flow sensor arranged at a different portion where the at least one flow sensor is arranged in a direction of a fluid flow having a first surface and a second surface opposite the first surface, the first surface of the flow sensor being configured to be in direct fluid communication with the fluid that is flowing upstream of the at least one flow-restrictor element, the second surface being configured to be in direct fluid communication with the fluid that is flowing downstream of the at least one flow-restrictor element, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one flow-restrictor element. ### Claim 12 (depends on 11) The flow meter of claim 11, wherein the at least one restrictor element is located within the single bend in the flow path. ### Claim 13 (depends on 11) The flow meter of claim 11, wherein the at least one flow-restrictor element is a laminar-flow element. ### Claim 14 (depends on 11) The flow meter of claim 11, wherein the at least one flow-restrictor is a plate configured transverse to a direction of fluid flow having at least one orifice formed therethrough. ### Claim 15 (depends on 11) The flow meter of claim 11, wherein the single bend in the flow path has a reduced cross-sectional area as compared with a cross-sectional area of remaining portions of the flow path, the at least one flow-restrictor comprising the reduced cross-sectional area. ### Claim 16 (depends on 11) The flow meter of claim 11, wherein a cross-sectional area of the inlet portion of the flow path is greater than a cross-sectional area of the outlet portion of the flow path. ### Claim 17 (depends on 11) The flow meter of claim 11, wherein a cross-sectional area of the outlet portion of the flow path is greater than a cross-sectional area of the inlet portion of the flow path. ### Claim 18 (depends on 11) The flow meter of claim 11, wherein the flow meter is configured to have no dead volumes located therein. ### Claim 19 A flow meter, comprising: an upstream portion flow path and a downstream portion flow path to transport a fluid, the upstream portion flow path and the downstream portion flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the upstream portion flow path and the downstream portion flow path; a flow-sensor carrier arranged transverse to a direction of the transported fluid and between the upstream portion flow path and the downstream portion flow path; at least one orifice formed through the flow-sensor carrier in substantially a same direction as a direction of the fluid, the at least one orifice to provide a pressure drop between the upstream portion flow path and the downstream portion flow path; and a flow sensor formed within the flow-sensor carrier and having a first surface and a second surface opposite the first surface, the first surface of the flow sensor being configured to be in direct fluid communication with the fluid that is flowing upstream of the flow-sensor carrier and the second surface of the flow sensor being configured to be in direct fluid communication with the fluid that is flowing downstream of the flow-sensor carrier, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one orifice.