# US 12,215,418 B2 · Apparatuses and method for oriented deposition > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,215,418 B2 - Document ID: US12215418B2 - Status: Granted - Kind: B2 - Application number: 17/603,429 - Filed: 2020-04-20 - Published: 2022-06-23 - Granted: 2025-02-04 - Earliest claimed: 2019-04-24 - Assignees: Canatu Finland Oy - Applicants: Canatu Finland Oy - Inventors: Ilkka Varjos; Anton Sergeevich Anisimov; Bjørn Fridur Mikladal; Dewei Tian - Web page: https://patentgrep.com/patent/US12215418B2 ## CPC - C23C 16/45504: {Laminar flow} - C01B 32/15: Nano-sized carbon materials - C23C 16/06: characterised by the deposition of metallic material - C23C 16/26: Deposition of carbon only - C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps} - C23C 16/45591: {Fixed means, e.g. wings, baffles} - C23C 16/52: Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} - C23C 24/04: Impact or kinetic deposition of particles - B05D 1/12: Applying particulate materials (B05D1/06, B05D1/10 take precedence) - B05D 2401/32: applied as powders - B82Y 40/00: Manufacture or treatment of nanostructures - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C} - B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract Apparatuses and a method for gas phase deposition of high aspect ratio molecular structures, HARM-structures, are presented. The first aspect relates to an apparatus configured for oriented gas phase deposition of HARM-structures on a filter. The second aspect relates to an apparatus configured for oriented gas phase deposition of HARM-structures on a substrate. A system comprising multiple apparatuses according to the second aspect is also presented. Elements of the apparatuses are arranged to create a laminar flow of gas comprising HARM-structures in the deposition area, and to direct this flow at least partially parallel to the deposition area. Another aspect of the invention is a method for oriented deposition of HARM-structures, suitable for deposition both on a filter and a substrate. ## Claims ### Claim 1 An apparatus, comprising: a deposition chamber elongated horizontally and comprising a top portion with a top cover and a bottom portion with a bottom cover, a filter positioned horizontally in the deposition chamber separating the top portion from the bottom portion, wherein the filter comprises a deposition area, an inlet arranged in the top portion of the deposition chamber and configured to provide a gas comprising high aspect ratio molecular structures, HARM-structures, into the deposition chamber, an outlet arranged in the bottom portion of the deposition chamber and configured to collect gas from the deposition chamber, and a control system configured to control gas flow at the inlet and the outlet, wherein the inlet, the outlet and the filter are arranged to create a gas flow path for the gas comprising HARM-structures from the inlet in the top portion towards the outlet in the bottom portion and through the filter, wherein the direction of flow of the gas comprising HARM-structures in proximity to the deposition area of the filter is at least partially parallel to the filter; and wherein the control system and the relative positions of the inlet, the outlet, the top cover, the bottom cover and the filter are arranged to maintain a laminar gas flow of the gas comprising HARM-structures in proximity to the deposition area of the filter. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the control system and the relative positions of the inlet, the outlet, the top cover, the bottom cover and the filter are arranged to maintain the Reynolds number of the laminar gas flow of the gas comprising HARM-structures in proximity to the deposition area of the filter between 10 and 3500. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the inlet and the outlet are positioned at opposing sides of the deposition chamber in the horizontal plane. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein: the filter extends horizontally and is embedded into the deposition chamber between the top portion and the bottom portion at a predetermined distance from the top cover and the bottom cover of the deposition chamber. ### Claim 5 (depends on 1) The apparatus of claim 1, comprising a support which encases the filter, extends horizontally and is embedded into the deposition chamber between the top portion and the bottom portion. ### Claim 6 (depends on 1) The apparatus of claim 1, comprising a first baffle with at least one opening, wherein the first baffle extends horizontally and is positioned adjacent to the filter, so that the gas flow path from the inlet towards the outlet passes through the portion of the filter adjacent to at least one opening in the first baffle. ### Claim 7 (depends on 6) The apparatus of claim 6, comprising a second baffle with at least one opening, wherein the second baffle extends horizontally and is positioned at a predetermined distance below the first baffle, creating a space between the first and second baffles and between top and bottom portions of the deposition chamber, and wherein the openings of the first baffle and the second baffle are arranged at opposing sides of the deposition chamber in the horizontal plane. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the distance from the top cover of the deposition chamber to the filter is between 0.1 and 10 millimeters, and the distance from the bottom cover of the deposition chamber to the filter is between 5 and 20 millimeters. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the filter is a membrane filter. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the control system is further configured to control temperature and pressure inside the reaction chamber. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the inlet has a circular shape in section and has a diameter between 5 and 100 millimeters. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein the inlet is shaped as a slit, and has a width between 0.5 and 18 millimeters. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the deposition chamber has a rectangular shape in the horizontal plane, and the inlet and outlet are arranged in opposite corners of the deposition chamber in the horizontal plane. ### Claim 14 (depends on 1) The apparatus of claim 1, comprising a porous plate with predetermined pore sizes extending horizontally and positioned below the filter in the deposition chamber. ### Claim 15 (depends on 1) The apparatus of claim 1, wherein the HARM-structures are selected from the group of: carbon nanotube molecules, carbon nanobud molecules, graphene ribbons, carbon or graphite fiber filaments and silver nanowires. ### Claim 16 (depends on 1) The apparatus of claim 1, wherein the dimensions of the deposition chamber are: 100-200 mm in height, 390-1040 mm in width and 515-1240 mm in length. ### Claim 17 An apparatus, comprising: a deposition chamber elongated horizontally and comprising a top portion with a top plate extending horizontally and a bottom portion with a bottom plate extending horizontally, a substrate positioned horizontally in the deposition chamber between top plate and the bottom plate, an inlet arranged in the top portion of the deposition chamber and configured to provide a gas comprising high aspect ratio molecular structures, HARM-structures, into the deposition chamber, at least one outlet arranged in the top portion of the deposition chamber and configured to collect gas from the deposition chamber, and a control system configured to control gas flow at the inlet and the at least one outlet, and the temperature and electric potential of the top plate and the bottom plate, wherein the top plate and the substrate are positioned to create a gap between the top plate and the substrate, so that the flow of the gas comprising HARM-structures from the inlet towards the at least one outlet is substantially parallel to the substrate, and wherein the control system is configured to: maintain the temperature of the top plate and the bottom plate at levels sufficiently different to create a temperature gradient in proximity to the substrate, and/or maintain the electric potential of the top plate and the bottom plate at values sufficient to create a uniform electric field in proximity to the substrate. ### Claim 18 (depends on 17) The apparatus of claim 17, wherein the control system and the relative positions of the inlet, the outlet, the top plate, the bottom plate and the substrate are arranged to maintain the gas flow of the gas comprising HARM-structures in proximity to the substrate laminar with a Reynolds number between 10 and 3500. ### Claim 19 (depends on 17) The apparatus of claim 17, further comprising at least one barrier gas inlet positioned in proximity to the at least one outlet configured to provide a barrier gas into the deposition chamber to prevent the gas comprising HARM-structures from spreading further in the deposition chamber. ### Claim 20 (depends on 17) The apparatus of claim 17, wherein the inlet is arranged in a central area of the top portion of the deposition chamber, and the at least one outlet is arranged in a peripheral area of the deposition chamber. ### Claim 21 (depends on 17) The apparatus of claim 17, wherein the distance from the top plate to the substrate is between 0.5 and 5 millimeters, and the distance from the bottom plate to the substrate is between 0 and 5 millimeters. ### Claim 22 (depends on 17) The apparatus of claim 17, wherein the substrate is a plastic film. ### Claim 23 (depends on 17) A system comprising two or more apparatuses of claim 17 positioned adjacent to each other. ### Claim 24 A method for oriented deposition of HARM-structures, the method comprising: providing, via an inlet, a gas comprising HARM-structures into a deposition chamber at a predetermined gas flow rate, wherein the deposition chamber is elongated horizontally and comprises a top portion and a bottom portion, an inlet in the top portion and an outlet in the bottom portion, the deposition chamber being capable of holding a filter positioned horizontally separating the top portion from the bottom portion; maintaining a laminar flow of the gas comprising HARM-structures at a Reynolds number between 10 and 3500 in proximity to a deposition area of the filter, wherein the laminar flow of the gas comprising HARM-structures is least partially parallel to the filter; depositing HARM-structures in the deposition area of the filter from the gas comprising HARM-structures; and collecting, via an outlet, the remaining gas from the deposition chamber at a predetermined gas flow rate. ### Claim 25 (depends on 24) The method of claim 24, further comprising controlling temperature and pressure inside the deposition chamber. ### Claim 26 A method for oriented deposition of HARM-structures, the method comprising: providing, via an inlet, a gas comprising HARM-structures into a deposition chamber at a predetermined gas flow rate, wherein the deposition chamber is elongated horizontally and comprises a top portion and a bottom portion, an inlet in the top portion and an outlet in the top portion, and a control system, the deposition chamber being capable of holding a substrate positioned horizontally separating the top portion from the bottom portion; maintaining a laminar flow of the gas comprising HARM-structures at a Reynolds number between 10 and 3500 in proximity to a deposition area of the substrate, wherein the laminar flow of the gas comprising HARM-structures is least partially parallel to the substrate; depositing HARM-structures in the deposition area of the substrate from the gas comprising HARM-structures; and collecting, via an outlet, the remaining gas from the deposition chamber at a predetermined gas flow rate. ### Claim 27 (depends on 26) The method of claim 26, further comprising: using the control system to maintain the temperature of the top plate and the bottom plate at levels sufficiently different to create a temperature gradient in proximity to the substrate. ### Claim 28 (depends on 26) The method of claim 26, further comprising: using the control system to maintain the electric potential of the top plate and the bottom plate at values sufficient to create a uniform electric field in proximity to the substrate.