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US 12,215,221 B2Granted
Material for forming organic film, method for forming organic film, patterning process, and compound
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsDaisuke Kori, Takayoshi Nakahara, Yusuke Biyajima, Kazumi Noda
Life of this patent
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Abstract
A material for forming an organic film containing a compound of general formula (1) in which X is an organic group having a valency of n1 and 2 to 50 carbon atoms, n1 is an integer of 2 to 10, R1 is at least one of formulae (2) to (4), where l1 is 0 or 1, and l2 is 0 or 1, and an organic solvent; an organic film material for forming an organic film that has all of high filling property, high planarizing property, and excellent adhesive force to a substrate.
Claims18
A material for forming an organic film, comprising:
- a compound shown by the following general formula (1);
- and
- an organic solvent,
- wherein X represents an organic group having a valency of n1 and 2 to 50 carbon atoms;
- n1 represents an integer of 2 to 10;
- and each of R1 is a group shown by any of the following general formulae (2) to (4), (16) and (17), and at least one of R1 is a group shown by any of general formulae (2) to (4),
- wherein * represents a bonding site to the organic group X;
- Ra and Rb each represent a hydrogen atom, or a linear or branched, saturated or unsaturated hydrocarbon group having 1 to 10 carbon atoms;
- Rc represents a hydrogen atom, a methyl group, or a phenyl group;
- m1 and m2 each represent an integer of 0 or 1;
- n2 and n3 each represent and satisfy a relation of n2+n3=2;
- and n4 represents an integer of 1 to 10,
- wherein * represents a bonding site to the organic group X;
- Rd and Re each represent a hydrogen atom, or a linear or branched, saturated or unsaturated hydrocarbon group having 1 to 10 carbon atoms;
- Rf represents a hydrogen atom, a methyl group, or a phenyl group;
- m3 and m4 each represent an integer of 0 or 1;
- n5 and n6 each represent and satisfy a relation of n5+n6=2;
- and l1 represents 0 or 1, when l1=1, a bridge structure is formed between aromatic rings via an oxygen atom as an ether bond, and when l1=0, no ether bond is present for forming the bridge structure between the aromatic rings, and
- wherein * represents a bonding site to the organic group X;
- Rg and Rh each represent a hydrogen atom, or a linear or branched, saturated or unsaturated hydrocarbon group having 1 to 10 carbon atoms;
- m5 and m6 each represent an integer of 0 or 1;
- n7 and n8 each represent an integer of 1 to 7, and satisfy a relation of n7+n8=2;
- and l2 represents 0 or 1, when l2=1, a bridge structure is formed between aromatic rings via an oxygen atom as an ether bond, and when l2=0, no ether bond is present for forming the bridge structure between the aromatic rings,
- wherein R2 represents a linear, branched, or cyclic, saturated or unsaturated hydrocarbon group having 1 to 30 carbon atoms;
- and a methylene group constituting the R2 group is optionally substituted with an oxygen atom or a carbonyl group, and
- wherein R3 represents a hydrogen atom, or a linear or branched hydrocarbon group having 1 to 10 carbon atoms;
- R4 represents a linear or branched hydrocarbon group having 1 to 10 carbon atoms, a halogen atom, a nitro group, an amino group, a nitrile group, an alkoxycarbonyl group having 1 to 10 carbon atoms, or an alkanoyloxy group having 1 to 10 carbon atoms;
- n11 represents any of 0 to 2;
- and n12 and n13 each represent the number of substituents on an aromatic ring, n12 represents 0 or 1, n13 represents an integer of 0 to 7, and n12+n13 is 0 or more and 7 or less.
26 more elements
A compound shown by the following general formula (1),
- wherein X represents an organic group having a valency of n1 and 2 to 50 carbon atoms;
- n1 represents an integer of 2 to 10;
- and each of R1 is a group shown by any of the following general formulae (2) to (4), (16) and (17), and at least one of R1 is a group shown by any of general formulae (2) to (4),
- wherein * represents a bonding site to the organic group X;
- Ra and Rb each represent a hydrogen atom, or a linear or branched, saturated or unsaturated hydrocarbon group having 1 to 10 carbon atoms;
- Rc represents a hydrogen atom, a methyl group, or a phenyl group;
- m1 and m2 each represent an integer of 0 or 1;
- n2 and n3 each represent and satisfy a relation of n2+n3=2;
- and n4 represents an integer of 1 to 10,
- wherein * represents a bonding site to the organic group X;
- Rd and Re each represent a hydrogen atom, or a linear or branched, saturated or unsaturated hydrocarbon group having 1 to 10 carbon atoms;
- Rf represents a hydrogen atom, a methyl group, or a phenyl group;
- m3 and m4 each represent an integer of 0 or 1;
- n5 and n6 each represent and satisfy a relation of n5+n6=2;
- and l1 represents 0 or 1, when l1=1, a bridge structure is formed between aromatic rings via an oxygen atom as an ether bond, and when l1=0, no ether bond is present for forming the bridge structure between the aromatic rings, and
- wherein * represents a bonding site to the organic group X;
- Rg and Rh each represent a hydrogen atom, or a linear or branched, saturated or unsaturated hydrocarbon group having 1 to 10 carbon atoms;
- m5 and m6 each represent an integer of 0 or 1;
- n7 and n8 each represent an integer of 1 to 7, and satisfy a relation of n7+n8=2;
- and l2 represents 0 or 1, when l2=1, a bridge structure is formed between aromatic rings via an oxygen atom as an ether bond, and when l2=0, no ether bond is present for forming the bridge structure between the aromatic rings,
- wherein R2 represents a linear, branched, or cyclic, saturated or unsaturated hydrocarbon group having 1 to 30 carbon atoms;
- and a methylene group constituting the R2 group is optionally substituted with an oxygen atom or a carbonyl group, and
- wherein R3 represents a hydrogen atom, or a linear or branched hydrocarbon group having 1 to 10 carbon atoms;
- R4 represents a linear or branched hydrocarbon group having 1 to 10 carbon atoms, a halogen atom, a nitro group, an amino group, a nitrile group, an alkoxycarbonyl group having 1 to 10 carbon atoms, or an alkanoyloxy group having 1 to 10 carbon atoms;
- n11 represents any of 0 to 2;
- and n12 and n13 each represent the number of substituents on an aromatic ring, n12 represents 0 or 1, n13 represents an integer of 0 to 7, and n12+n13 is 0 or more and 7 or less.
23 more elements
Dependencies are inferred from the claim text.