# US 12,215,024 B2 · Adaptive MEMS device, codec for use with the MEMS device and method for providing diagnostic data, at run-time, on the current condition of a MEMS device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,215,024 B2 - Document ID: US12215024B2 - Status: Granted - Kind: B2 - Application number: 17/494,316 - Filed: 2021-10-05 - Published: 2022-05-26 - Granted: 2025-02-04 - Earliest claimed: 2020-11-20 - Assignees: Infineon Technologies AG - Applicants: Infineon Technologies AG - Inventors: Darragh Francis Corrigan; Andreas Wiesbauer; Guangzhao Zhang - Web page: https://patentgrep.com/patent/US12215024B2 ## CPC - B81C 1/00222: {Integrating an electronic processing unit with a micromechanical structure} - H04R 19/005: {using semiconductor materials} - B81B 7/007: {Interconnections between the MEMS and external electrical signals} - B81B 7/008: {MEMS characterised by an electronic circuit specially adapted for controlling or driving the same (B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00)} - H04R 1/04: Structural association of microphone with electric circuitry therefor (in electric hearing aids H04R25/00) - H04R 19/04: Microphones (H04R19/01 takes precedence) - H04R 29/004: {for microphones (H04R29/007 takes precedence)} - B81B 2201/0257: Microphones or microspeakers - H04R 2201/003: Mems transducers or their use - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K) - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract An adaptive MEMS device includes a MEMS microphone and integrated circuitry, wherein the integrated circuitry is electrically connected to the MEMS microphone. The integrated circuitry reads out an output signal from the MEMS microphone and provides the output signal or a rendered output signal, via a first integrated interface, to an external processing device. Additionally, the integrated circuitry determines, at run-time, diagnostic data on the current condition of the MEMS device and provides, at run-time, the diagnostic data, via a second integrated interface, to the external processing device. ## Claims ### Claim 1 An adaptive microelectromechanical system (MEMS) device comprising: a MEMS microphone; and integrated circuitry, wherein the integrated circuitry is electrically connected to the MEMS microphone, and wherein the integrated circuitry is configured to: read out a non-stimulated sensed output signal from the MEMS microphone; provide the non-stimulated sensed output signal or a rendered version of the non-stimulated sensed output signal, via a first integrated interface, to an external processing device; determine, at run-time, diagnostic data on a current condition of the MEMS device, by comparing the non-stimulated sensed output signal to a reference value or reference signal, thereby synergistically using the integrated circuitry to both read out the non-stimulated sensed output signal and determine the diagnostic data; and provide, at run-time, the diagnostic data, via a second integrated interface, to the external processing device. ### Claim 2 (depends on 1) The MEMS device according to claim 1, wherein the second integrated interface comprises the first integrated interface; and wherein the integrated circuitry is configured to provide the non-stimulated sensed output signal or the rendered version of the non-stimulated sensed output signal, via the second integrated interface, to the external processing device. ### Claim 3 (depends on 1) The MEMS device according to claim 1, wherein the second integrated interface is a bidirectional integrated interface, and wherein the integrated circuitry is configured to receive, via the bidirectional integrated interface, at run-time, a control information for setting an operation characteristic of the MEMS device from the external processing device. ### Claim 4 (depends on 3) The MEMS device according to claim 3, wherein the integrated circuitry is further configured to determine, at run-time, the diagnostic data based on the control information received, at run-time, via the bidirectional integrated interface from the external processing device. ### Claim 5 (depends on 3) The MEMS device according to claim 3, wherein the integrated circuitry is configured to control an operating condition of the MEMS microphone based on the control information received, at run-time, via the bidirectional integrated interface, from the external processing device. ### Claim 6 (depends on 1) The MEMS device according to claim 1, wherein the integrated circuitry comprises a memory, and wherein the integrated circuitry is configured to store the diagnostic data in the memory. ### Claim 7 (depends on 1) The MEMS device according to claim 1, wherein the diagnostic data comprises information on a leakage impedance of the MEMS microphone. ### Claim 8 (depends on 1) The MEMS device according to claim 1, wherein at least one of the MEMS microphone or the integrated circuitry is configured to be stimulated with a test stimulus, and wherein the integrated circuitry is configured to: evaluate a resulting response signal in reaction to the test stimulus in order to determine the diagnostic data; or provide the resulting response signal, via the second integrated interface, to the external processing device. ### Claim 9 (depends on 8) The MEMS device according to claim 8, wherein the integrated circuitry is configured to generate the test stimulus for the stimulation, or wherein the integrated circuitry is configured to receive, via the second integrated interface, the test stimulus from the external processing device. ### Claim 10 (depends on 1) The MEMS device according to claim 1, wherein the integrated circuitry is configured to stimulate, at run-time, a resonance frequency of the MEMS microphone, and wherein the integrated circuitry is configured to: evaluate a resulting resonance response of the MEMS microphone in reaction to the stimulation of the resonance frequency in order to determine the diagnostic data; or provide the resulting resonance response of the MEMS microphone in reaction to the stimulation of the resonance frequency, via the second integrated interface, to the external processing device. ### Claim 11 (depends on 1) The MEMS device according to claim 1, wherein the MEMS microphone is a digital output MEMS microphone or an analog output MEMS microphone. ### Claim 12 (depends on 1) The MEMS device according to claim 1, wherein the integrated circuitry comprises an ASIC, and wherein the ASIC comprises the second integrated interface. ### Claim 13 (depends on 1) A CODEC for use with the MEMS device according to claim 1, wherein the external processing device comprises the CODEC, wherein the CODEC comprises a communication interface, and wherein the CODEC is configured to perform at least one of: providing, at run-time, a control information via the communication interface for the MEMS device, or receiving, at run-time, the diagnostic data on the current condition of the MEMS device, via the communication interface, from the MEMS device. ### Claim 14 A method for operating an adaptive microelectromechanical system (MEMS) device comprising integrated circuitry electrically connected to a MEMS microphone, the method comprising: reading out, by the integrated circuitry, a non-stimulated sensed output signal from the MEMS microphone; providing, by the integrated circuitry, the non-stimulated sensed output signal or a rendered version of the non-stimulated sensed output signal to an external processing device, via a first integrated interface; determining, by the integrated circuitry, at run-time, diagnostic data on a current condition of the MEMS device, by comparing the non-stimulated sensed output signal to a reference value or reference signal, thereby synergistically using the integrated circuitry for both reading out the non-stimulated sensed output signal and determining the diagnostic data; and providing, by the integrated circuitry, at run-time, the diagnostic data to the external processing device, via a second integrated interface. ### Claim 15 (depends on 14) The method according to claim 14, wherein determining, at run-time, the diagnostic data further comprises: stimulating, with a test stimulus, the MEMS device and evaluating a resulting response signal in reaction to the test stimulus in order to determine the diagnostic data. ### Claim 16 (depends on 14) A non-transitory computer-readable storage medium having stored thereon a computer program having a program code for performing, when running on a computer, the method according to claim 14. ### Claim 17 (depends on 14) The method according to claim 14, wherein determining, at run-time, the diagnostic data further comprises: stimulating, at run-time, a resonance frequency of the MEMS device and evaluating a resulting resonance response of the MEMS device in reaction to the stimulation of the resonance frequency in order to determine the diagnostic data. ### Claim 18 (depends on 14) The method according to claim 14, further comprising receiving, by the integrated circuitry, at run-time, a control information for setting an operation characteristic of the MEMS device from the external processing device. ### Claim 19 (depends on 18) The method according to claim 18, further comprising determining, at run-time, the diagnostic data based on the control information received, at run-time, from the external processing device. ### Claim 20 (depends on 18) The method according to claim 18, further comprising controlling an operating condition of the MEMS microphone based on the control information.