Microelectromechanical microphone with reduced overall size
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSamer Dagher, Loic Joet
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSamer Dagher, Loic Joet
Estimating the term…
A microelectromechanical microphone including a microphone unit made from a first substrate, the microphone unit including a movable element capable of being displaced under the effect of a pressure difference and a device for measuring the displacement of the movable element, a cover made from a second substrate, the cover having a first recess, first device for electrically connecting the measurement device to a control unit, the microphone unit and the cover delimiting between them a vacuum space housing the measurement device and a first cavity, from the first recess, partly closed by the movable element, the vacuum space and the first cavity being insulated in a sealed manner from each other, the microphone including a device for mechanically transmitting the displacement of the movable element to the measurement device and a sealed insulation element through which the transmission device passes.
A microelectromechanical microphone, comprising:
Dependencies are inferred from the claim text.