# US 12,215,017 B2 · Vibration sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,215,017 B2 - Document ID: US12215017B2 - Status: Granted - Kind: B2 - Application number: 17/611,541 - Filed: 2020-05-14 - Published: 2022-07-07 - Granted: 2025-02-04 - Earliest claimed: 2019-05-15 - Assignees: The Regents of the University of Michigan - Applicants: The Regents of the University of Michigan - Inventors: Alison Hake; Karl Grosh - Web page: https://patentgrep.com/patent/US12215017B2 ## CPC - B81B 3/0018: {Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators} - H04R 1/245: {of microphones} - G01H 11/08: using piezoelectric devices - H10N 30/204: {using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders} - H10N 30/872: {Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices} - B81B 2201/0285: Vibration sensors - H04R 17/02: Microphones - H04R 17/10: Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency - H04R 2201/003: Mems transducers or their use - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K) - G01H: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract A sensor, such as a piezoelectric MEMS vibration sensor, includes a frame, a beam array comprising a plurality of beams, and a plurality of masses. Each beam of the plurality of beams has an anchored end and an unanchored end, with each beam being coupled to the frame at the anchored end. The unanchored end of each beam is coupled to a respective mass of the plurality of masses. Each beam of the plurality of beams can be configured to minimize a variation in a voltage output for a limited frequency range. In some implementations, the resonant frequency of each beam corresponds to a sensitivity peak in a limited frequency range. ## Claims ### Claim 1 A sensor, comprising: a frame; a beam array comprising a plurality of beams, wherein each beam of the plurality of beams has an anchored end and an unanchored end, wherein each beam is coupled to the frame at the anchored end; and a plurality of masses, wherein the unanchored end of each beam is coupled to a respective mass of the plurality of masses, wherein the beam array has a xylophonic shape, and wherein each mass has a mass thickness, and each mass thickness has a xylophonic variation that corresponds to the xylophonic shape of the beam array. ### Claim 2 (depends on 1) The sensor of claim 1, wherein each beam includes a cantilevered bimorph multi-layer structure. ### Claim 3 (depends on 2) The sensor of claim 2, wherein one or more beams of the plurality of beams includes an exposed body portion that is located between an electrode and the respective mass. ### Claim 4 (depends on 1) The sensor of claim 1, wherein a size of each mass of the plurality of masses correlates with a length of each beam of the plurality of beams. ### Claim 5 (depends on 1) The sensor of claim 1, wherein a center of gravity for each mass in the plurality of masses is vertically aligned with a neutral axis, lies above the neutral axis, or lies below the neutral axis of each beam of the plurality of beams. ### Claim 6 (depends on 1) The sensor of claim 1, wherein each beam of the plurality of beams is configured to minimize a variation in a voltage output for a limited frequency range. ### Claim 7 (depends on 1) The sensor of claim 1, wherein each beam of the plurality of beams has a resonant frequency, and the resonant frequency of each beam corresponds to a sensitivity peak in a limited frequency range. ### Claim 8 (depends on 1) The sensor of claim 1, wherein two or more beams of the plurality of beams have different resonant frequencies. ### Claim 9 A sensor, comprising: a frame; and a beam array comprising a plurality of beams, wherein each beam of the plurality of beams has a resonant frequency, wherein the resonant frequency of each beam corresponds to a sensitivity peak in a limited frequency range, wherein each beam of the plurality of beams has an anchored end and an unanchored end, wherein each beam is coupled to the frame at the anchored end and a mass is coupled to each beam of the plurality of beams at the unanchored end, and wherein a size of each mass of the plurality of masses correlates with a length of each beam of the plurality of beams. ### Claim 10 (depends on 9) The sensor of claim 9, wherein each beam of the plurality of beams is configured to minimize a variation in a voltage output for the limited frequency range. ### Claim 11 A sensor, comprising: a frame; and a beam array comprising a plurality of beams, wherein two or more beams of the plurality of beams have different resonant frequencies, wherein each beam of the plurality of beams has an anchored end and an unanchored end, wherein each beam is coupled to the frame at the anchored end and a mass is coupled to each beam of the plurality of beams at the unanchored end, and wherein a size of each mass of the plurality of masses correlates with a length of each beam of the plurality of beams. ### Claim 12 (depends on 11) The sensor of claim 11, wherein each beam of the plurality of beams has a resonant frequency and the resonant frequency of each beam corresponds to a sensitivity peak in a limited frequency range. ### Claim 13 (depends on 11) The sensor of claim 11, wherein each beam of the plurality of beams is configured to minimize a variation in a voltage output for a limited frequency range.