Conveyance apparatus, planarization apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorTakashi Hosaka
Life of this patent
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Abstract
A conveyance apparatus loads a pressing member to a planarization apparatus that forms a planarized film made of a material on a substrate by bringing a flat surface of the pressing member and the material on the substrate into contact with each other. The pressing member includes a first surface including the flat surface, and a second surface on an opposite side of the first surface. The conveyance apparatus comprises a determiner configured to perform determination as to whether a determination surface of the pressing member is the first surface or the second surface, and a controller configured to control the conveyance of the pressing member based on a result of the determination by the determiner.
Claims13
A conveyance apparatus that loads a pressing member to a planarization apparatus that forms a planarized film made of a material on a substrate by bringing a flat surface of the pressing member and the material on the substrate into contact with each other, the pressing member including a first surface including the flat surface, and a second surface on an opposite side of the first surface, the conveyance apparatus comprising:
- a determiner configured to perform determination as to whether a determination surface of the pressing member is the first surface or the second surface;
- and
- a controller configured to control the conveyance of the pressing member based on a result of the determination by the determiner,
- wherein the determiner is configured to perform the determination in a state in which the pressing member is placed on a predetermined placement surface.
A planarization apparatus that forms a planarized film made of a material on a substrate by bringing a flat surface of a pressing member and the material on the substrate into contact with each other, the pressing member including a first surface including the flat surface, and a second surface on an opposite side of the first surface, the apparatus comprising:
- a determiner configured to perform determination as to whether a determination surface of the pressing member is the first surface or the second surface, and
- a controller configured to control conveyance of the pressing member based on a result of the determination by the determiner,
- wherein the determiner is configured to perform the determination in a state in which the pressing member is placed on a predetermined placement surface.
Dependencies are inferred from the claim text.