# US 12,213,834 B2 · Ultrasound transducer with acoustic absorber structure

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- Number: US 12,213,834 B2
- Document ID: US12213834B2
- Status: Granted
- Kind: B2
- Application number: 16/953,072
- Filed: 2020-11-19
- Published: 2021-05-27
- Granted: 2025-02-04
- Earliest claimed: 2019-11-22
- Assignees: Exo Imaging, Inc.
- Applicants: Exo Imaging, Inc.
- Inventors: Daniela Marisa Fredrick; Charles Baumgartner; Brian Lee Bircumshaw; Joseph Michael Adam
- Web page: https://patentgrep.com/patent/US12213834B2

## CPC

- A61B 8/4444: {related to the probe}
- A61B 8/4483: {characterised by features of the ultrasound transducer}
- G01S 7/52079: {Constructional features (constructional features of transducers B06B; mounting transducers G10K11/00; constructional features of ultrasonic medical diagnostic devices A61B8/44)}
- G10K 11/002: {Devices for damping, suppressing, obstructing or conducting sound in acoustic devices (G10K1/06 - G10K1/10 take precedence; for electro-mechanical transducers for communication H04R3/002)}
- G10K 11/165: Particles in a matrix
- A61B 8/546: {involving monitoring or regulation of device temperature}
- C08J 2205/00: Foams characterised by their properties
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G10K: SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- C08J: WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H (working, e.g. shaping, of plastics B29)

## Abstract

Described are acoustic absorber materials with high acoustic attenuation and high thermal conductivity comprising an inorganic, porous foam and an absorbing material within at least a portion of the pores of the foam, ultrasound transducers and devices including the same, as well as methods of making the materials.

## Claims

### Claim 1

An ultrasound probe comprising:
(a) a printed circuit board (PCB);
(b) an application-specific integrated circuit (ASIC) coupled to the PCB directly above the PCB;
(c) a piezoelectric micromachined ultrasound transducer (pMUT) coupled to the ASIC; and
(d) a thermally conductive acoustic absorber mounted between the PCB and a heatsink, the thermally conductive acoustic absorber comprising:
i) an acoustic absorber comprising a porous copper foam having a plurality of pores; and
(ii) an acoustic absorbing material comprising an epoxy and tungsten particle mixture within at least a portion of the plurality of pores of the porous copper foam.

### Claim 2 (depends on 1)

The ultrasound probe of claim 1, wherein the pores form a continuous network.

### Claim 3 (depends on 1)

The ultrasound probe of claim 1, wherein the pores form a semi-continuous network.

### Claim 4 (depends on 1)

The ultrasound probe of claim 1, wherein the pores are partially closed.

### Claim 5 (depends on 1)

The ultrasound probe of claim 1, wherein the pores are closed.

### Claim 6 (depends on 1)

The ultrasound probe of claim 1, wherein the porous foam has a pore density of about 2 pores/cm to about 100 pores/cm.

### Claim 7 (depends on 1)

The ultrasound probe of claim 1, wherein the porous foam has a porosity of about 60% to about 98%.

### Claim 8 (depends on 1)

The ultrasound probe of claim 1, wherein the porous foam comprises a cellular material, a sponge material, or both.

### Claim 9 (depends on 1)

The ultrasound probe of claim 1, wherein the porous foam comprises an inorganic material with a porous foam structure.

### Claim 10 (depends on 9)

The ultrasound probe of claim 9, wherein the inorganic material comprises a metal, a metal alloy, a ceramic, a semiconductor, a composite, or any combination thereof.

### Claim 11 (depends on 10)

The ultrasound probe of claim 10, wherein the inorganic material is at least partially crystalline.

### Claim 12 (depends on 1)

The ultrasound probe of claim 1, further comprising an acoustic reflector mounted between the PCB and the acoustic absorber to reflect at least a portion of acoustic energy back toward the ultrasound transducer before any remaining acoustic energy reaches the acoustic absorber.

### Claim 13 (depends on 1)

The ultrasound probe of claim 1, wherein the thermally conductive acoustic absorber is directly bonded to the PCB and the heatsink.

### Claim 14 (depends on 1)

The ultrasound probe of claim 1, wherein the acoustic absorber reduces reflections of acoustic energy off the heatsink and wherein a thermal conductivity of the acoustic absorber is sufficient to act as a heatsink.

### Claim 15 (depends on 1)

The ultrasound probe of claim 1, wherein the pMUT is coupled to the ASIC through a plurality of pillars.

### Claim 16

An ultrasound probe comprising:
(a) a printed circuit board (PCB);
(b) an application-specific integrated circuit (ASIC) coupled to the PCB;
(c) a piezoelectric micromachined ultrasound transducer (pMUT) coupled to the ASIC; and
(d) a thermally conductive acoustic absorber mounted between the PCB and the ASIC, the thermally conductive acoustic absorber comprising:
(i) an acoustic absorber comprising a porous copper foam having a plurality of pores; and
(ii) an acoustic absorbing material comprising an epoxy and tungsten particle mixture within at least a portion of the plurality of pores of the porous copper foam.

### Claim 17 (depends on 16)

The ultrasound probe of claim 16, wherein the pMUT is coupled to the ASIC through a plurality of pillars.

### Claim 18

An ultrasound probe comprising:
(a) a printed circuit board (PCB);
(b) an application-specific integrated circuit (ASIC) coupled to the PCB;
(c) a micromachined ultrasound transducer (MUT) coupled to the ASIC; and
(d) a thermally conductive acoustic absorber comprising:
(i) a porous foam having a plurality of pores that form a semi-continuous network; and
(ii) an acoustic absorbing material within at least a portion of the plurality of pores of the porous foam.

### Claim 19 (depends on 18)

The ultrasound probe of claim 18, wherein the porous foam comprises a copper foam.

### Claim 20 (depends on 19)

The ultrasound probe of claim 19, wherein the acoustic absorbing material comprises an epoxy and an inorganic filler.

### Claim 21 (depends on 20)

The ultrasound probe of claim 20, wherein the inorganic filler comprises tungsten.

### Claim 22 (depends on 18)

The ultrasound probe of claim 18, wherein the porous foam comprises an inorganic material with a porous foam structure.

### Claim 23 (depends on 18)

The ultrasound probe of claim 18, wherein the MUT comprises a piezoelectric micromachined ultrasound transducer.

### Claim 24 (depends on 18)

The ultrasound probe of claim 18, wherein the MUT is coupled to the ASIC through a plurality of pillars.

### Claim 25 (depends on 18)

The ultrasound probe of claim 18, wherein the PCB and the MUT are coupled to different sides of the ASIC.
