Heat sink

A multilayer heat sink that cools an object in contact with the heat sink by flowing a fluid from a fluid inlet to a fluid outlet, the heat sink comprising:

• a heat-receiving layer having a top surface in contact with the object to receive heat;
• a channel layer provided on a bottom surface of the heat-receiving layer, the channel layer including cooling micropaths extending and directing the fluid in a direction orthogonal to a stacking direction;
• an orifice layer provided on a bottom surface of the channel layer, the orifice layer including:
• jet orifices configured to jet the fluid into the cooling micropaths from a header layer;
• and
• drain orifices configured to drain the fluid from the cooling micropaths toward the header layer;
• the header layer provided on a bottom surface of the orifice layer, the header layer including:
• a peripheral wall;
• and
• a baffle provided in a region surrounded by the peripheral wall, the baffle being configured to separate the fluid inlet from the fluid outlet;
• and
• a bottom layer provided on a bottom surface of the header layer, wherein
• the baffle includes:
• parallel plates disposed parallel to each other;
• and
• end plates configured to alternately close an opening at an end and an opening at an opposite end of the parallel plates,
• the orifice layer, the bottom layer, the baffle, and the peripheral wall define a supply channel to guide the fluid from the fluid inlet to the jet orifices and a drain channel to guide the fluid from the drain orifices to the fluid outlet,
• the channel layer includes a plurality of channel layers between which an intermediate layer is interposed, and
• the intermediate layer includes:
• intermediate jet orifices disposed at positions overlapping the jet orifices when seen in the stacking direction;
• and
• intermediate drain orifices disposed at positions overlapping the drain orifices when seen in the stacking direction.