Stage, film-forming apparatus, and film-processing apparatus

A stage comprising:

• a first supporting plate;
• a second supporting plate located under the first supporting plate and having a first through hole and a second through hole;
• a shaft located under the second supporting plate and overlapping with the first supporting plate and the second supporting plate;
• and
• at least one sheath heater comprising a heater wire, an insulator surrounding the heater wire, a metal sheath surrounding the insulator and configured to receive thermal energy from the heater wire, and a lead wiring electrically connected to the heater wire,
• wherein the metal sheath passes through the first through hole and the second through hole of the second supporting plate and includes an upper portion and a lower portion respectively extending on a first plane and a second plane which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate,
• wherein the metal sheath has two bent portions respectively bent at the first through hole and the second through hole,
• the upper portion extends from the first through hole to the second through hole,
• the metal sheath contains stainless steel,
• the first supporting plate and the second supporting plate each contain aluminum, and
• wherein the upper portion is exposed from the upper surface of the second supporting plate, and
• the lower portion extending on the second plane is exposed from a lower surface of the second supporting plate.