Substrate processing device and method of manufacturing substrate processing device

A method of manufacturing a substrate processing device including a processing container including a mounting table on which a substrate is mounted and a target holder configured to hold a target, in the processing container, a refrigeration device disposed to have a gap between a lower surface of the mounting table and the refrigeration device, the refrigeration device having a refrigerator and a refrigerating heat medium stacked on the refrigerator, a first elevating device configured to raise or lower the refrigeration device, a refrigerant flow path provided inside the refrigeration device to supply a refrigerant to the gap, a compression device configured to compress the refrigerant supplied to the refrigerant flow path, and refrigerant transfer pipes connected and fixed to both first connection-fixing units which are a flow path port of the refrigerant flow path in the refrigeration device and second connection-fixing units which fluid-communicate with the compression device,

• the method comprising:
• extending each of the refrigerant transfer pipes in a state where at least a portion of the refrigerant transfer pipes is curved between the first connection-fixing units and the second connection-fixing units, and placing each of the refrigerant transfer pipes on a support member at the second connection-fixing units.