High framerate and high dynamic range electron microscopy
AssigneeIntegrated Dynamic Electron Solutions, Inc.
InventorsRuth Bloom, Sang Tae Park, Bryan Reed, Daniel Masiel
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Abstract
Methods and systems for acquiring transmission electron microscope video data on a rolling-shutter detector at an enhanced frame rate and without temporal distortions are described. Also described are methods to enhance the dynamic range of image and diffraction data acquired using a transmission electron microscope. The disclosed methods and systems may also be applicable to photon detection and imaging systems.
Claims23
A system for acquiring transmission electron microscopy data, the system comprising:
- a transmission electron microscope including a two-dimensional deflector configured to deflect electrons transmitted or scattered by a sample positioned at a sample plane and a two-dimensional detector array including two or more sub-regions, each sub-region configured to detect a portion of the electrons;
- and
- a controller configured to modulate a deflector control signal such that the electrons are sequentially deflected to the two or more sub-regions of the two-dimensional detector array and to synchronize modulation of the deflector control signal with a detector array readout cycle and a shutter synchronization signal such that the electrons are directed to a sub-region within the two or more sub-regions that is not actively being read out.
A system for acquiring transmission electron microscopy data, the system comprising:
- a transmission electron microscope including a two-dimensional detector array having two or more sub-regions, the transmission electron microscope configured to transmit electrons towards a sample in a sample plane and the two-dimensional detector array;
- and
- a two-dimensional deflector configured to deflect the transmitted or scattered electrons by the sample to the two or more sub-regions of the two-dimensional detector array, wherein the deflection is synchronized with a series of recurring detector array read-out cycles, wherein the deflection of the transmitted electrons or scattered by the sample are directed to sub-regions that are not actively being read out.
Dependencies are inferred from the claim text.