Charge carrier generation source
AssigneeScia Systems GmbH
InventorsEnrico Loos, Matthias Nestler
Life of this patent
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Abstract
A carrier generation source is provided, comprising a carrier generation area configured to provide carriers and a grid electrode, the grid electrode comprising an electrically conductive carrier, the carrier having a first side and a second side opposite the first side, the first side being directly adjacent the carrier generation area, the carrier having a plurality of through-holes extending from the first side through the carrier to the second side, the through-holes on the first side each having a first opening surface and the through-holes on the second side having a second opening surface, the first opening surface being larger than the second opening surface.
Claims14
Charge carrier generation source, comprising
- a carrier generation area configured to provide charge carriers;
- and
- a grid electrode, the grid electrode comprising an electrically conductive carrier, the carrier having a first side and a second side opposite the first side, the first side being directly adjacent to the carrier generation area,
- wherein the carrier has a plurality of through-holes extending from the first side through the carrier to the second side,
- wherein the through-holes each have a first opening surface on the first side and the through-holes each have a second opening surface on the second side,
- wherein the first opening surface is larger than the second opening surface.
Dependencies are inferred from the claim text.