Electroconductive-film-coated substrate and reflective mask blank
AssigneeAGC Inc.
InventorsSotaro Nakamura, Masayoshi Mizoguchi, Takeshi Tomizawa, Takahira Miyagi, Ryusuke Morita
Life of this patent
Estimating the term…
Abstract
An electroconductive-film-coated substrate includes a glass substrate and an electroconductive film disposed on one main surface of the glass substrate. The electroconductive film has an inclined portion in a peripheral edge. A distance from a position in the inclined portion where a thickness of the electroconductive film is 10% of a film thickness of a center of the electroconductive film to an edge end of the glass substrate is 3.00 mm or less. A distance from an end of the inclined portion to the edge end of the glass substrate is longer than 0.00 mm.
Claims6
A reflective mask blank comprising:
- a glass substrate including a chamfered surface in a peripheral edge portion of the main surface;
- an electroconductive film disposed on one main surface of the glass substrate;
- a reflective layer for reflecting EUV light disposed on a main surface of the glass substrate of the electroconductive-film-coated substrate on an opposite side from the main surface where the electroconductive film has been disposed;
- and
- an absorption layer for absorbing EUV light disposed over the reflective layer,
- wherein the electroconductive film comprises an inclined portion in a peripheral edge,
- a distance from a position in the inclined portion where a thickness of the electroconductive film is 10% of a film thickness of a center of the electroconductive film to an edge end of the glass substrate is 3.00 mm or less,
- a distance from an end of the inclined portion to the edge end of the glass substrate is longer than 0.00 mm, and
- at least a part of the end of the inclined portion lies within the chamfered surface.
Dependencies are inferred from the claim text.