Non-spatial measurement calibration methods and associated systems and devices

Abstract

Systems and methods for calibrating non-spatial measurements of a device under test (DUT) for misalignment between the DUT and a non-spatial measurement device are disclosed herein. A system for generating a misalignment calibration database can include, for example, a non-spatial measurement device and a high-precision translation stage. The system can generate a misalignment calibration database by taking measurements of a DUT at multiple misalignment locations. A system for measuring a DUT can include, for example, a spatial measurement device, a non-spatial measurement device, a translation stage, and/or a carrier tray. The system can capture measurements of the DUT at a first position and calibrate the measurements for misalignment using calibration data corresponding to the first position. For example, the system can retrieve calibration data from a calibration misalignment system that was taken at the same and/or different locations proximate the position of the DUT.

Dependencies are inferred from the claim text.