Methods for producing nanoscale patterns, nano-fluidic devices, and nanogap electrochemical devices
AssigneeKing Abdullah University of Science and Technology
InventorsThomas D. Anthopoulos, Kalaivanan Loganathan, Ulrich Buttner, Emre Yengel, Hendrik Andreas Faber
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Abstract
A method for manufacturing a soft stamp includes providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes; pouring a curable substance over the first and second electrodes and into the nanogap Ng; curing the curable substance to form a soft stamp; and removing the soft stamp from the first and second electrodes. The soft stamp has a nano-feature having a size less than 100 nm.
Claims18
A method for manufacturing a soft stamp, the method comprising:
- providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes;
- pouring a curable substance over the first and second electrodes and into the nanogap Ng;
- curing the curable substance to form a soft stamp;
- and
- removing the soft stamp from the first and second electrodes,
- wherein the soft stamp has a nano-feature having a size less than 100 nm.
A method for making a mask, the method comprising:
- providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes;
- pouring a curable substance over the first and second electrodes and into the nanogap Ng;
- curing the curable substance to form a soft stamp having nano-features;
- removing the soft stamp from the first and second electrodes;
- and
- forming a mask that mirrors the soft stamp, based on the soft mask,
- wherein the mask is used for manufacturing a device.
A method for manufacturing a soft stamp to be used in the manufacturing of a device, the method comprising:
- providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes;
- depositing an anti-sticking layer over the first and second electrodes and the substrate;
- pouring a curable substance over the first and second electrodes and into the nanogap Ng;
- pressing the curable substance with a movable substrate, toward the substrate;
- curing the curable substance to form a soft stamp;
- and
- removing the soft stamp from the first and second electrodes, with the movable substrate.
Dependencies are inferred from the claim text.