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US 12,209,010 B2Granted
MEMS and method of manufacturing the same
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsShanshan Gu-Stoppel, Malte Florian Niekiel, Thomas Lisec, Fabian Lofink
Life of this patent
Estimating the term…
Abstract
A MEMS includes a substrate having an element movably suspended relative to the substrate, the element having a first main surface and an opposite second main surface. The MEMS includes a first spring element connected between the substrate and a first column structure connected to the second main surface, and includes a second spring element connected between the substrate and a second column structure connected to the second main surface.
Claims31
A MEMS (Microelectromechanical systems) comprising:
- a substrate and an element movably suspended relative to the substrate, the element comprising a first main surface and an opposite second main surface;
- a first spring element connected between the substrate and a first column structure connected to the second main surface, and a second spring element connected between the substrate and a second column structure connected to the second main surface.
Dependencies are inferred from the claim text.