Tape affixing apparatus

A tape affixing apparatus for affixing a tape to an annular frame having an opening defined centrally therein for accommodating a wafer therein, comprising:

• a frame support table for supporting the annular frame thereon;
• a lifting and lowering unit for lifting and lowering the frame support table;
• a tape affixing unit disposed in facing relation to the frame support table;
• and
• a controller,
• a tape uncoiler for paying out the tape;
• a tape take-up reel for winding up the tape that has been used, and
• a presser roller disposed between the tape uncoiler and the tape take-up reel and movable from a first end to an opposing, second end of the annular frame supported on the frame support table while pressing the tape paid out from the tape uncoiler to affix the tape to the annular frame, and
• the controller positions the presser roller in a pressing position, affixes the tape to the first end of the annular frame while applying tension to the tape, moves the presser roller toward the second end of the annular frame, and keeps the tension applied to the tape constant by lifting the frame support table simultaneously with moving the presser roller toward the second end of the annular frame.