Processing system, processing method, and storage medium
AssigneeKabushiki Kaisha Toshiba
InventorTatsuhiro Oda
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a processing system includes a chamber, a supplier, a detector, and a controller. The chamber is configured to store a processing object inside. The supplier is configured to supply a plurality of particles and a gas inside the chamber. The detector is configured to detect a state of air flow in a vicinity of the processing object. The controller is configured to control the supplier based on a detection value from the detector. The controller determines generation of a vortex based on data regarding a steady state of the air flow and the detection value from the detector, and controls the supplier to stop supply of the plurality of particles when the generation of the vortex is determined.
Claims20
A processing system, comprising:
- a chamber configured to store a processing object inside;
- a supplier configured to supply a plurality of particles and a gas inside the chamber;
- a flow velocity meter configured to detect a flow velocity value and flow direction of the gas including the plurality of particles in a vicinity of the processing object;
- and
- a controller configured to control the supplier based on a detection value from the flow velocity meter,
- the controller is configured to:
- determine a generation of a vortex based on flow velocity value and flow direction of the gas including the plurality of particles from the flow velocity meter and predetermine a steady state of flow velocity value and flow direction of the gas including the plurality of particles, and
- control the supplier to stop supply of the plurality of particles when the generation of the vortex is determined.
A processing method, comprising:
- supplying a plurality of particles and a gas to a processing object,
- in the supplying, the method including
- detecting a flow velocity value and flow direction of the gas including the plurality of particles in a vicinity of the processing object,
- determining generation of a vortex based on flow velocity value and flow direction of the gas including the plurality of particles and predetermine a steady state of flow velocity value and flow direction of the gas including the plurality of particles, and
- stopping supply of the plurality of particles when the generation of the vortex is determined.
A storage medium configured to be a computer-readable storage medium, the storage medium storing a program, the storage medium causing the computer to execute following steps when the program is executed by a processor,
- causing a supplier to supply a plurality of particles and a gas to a processing object, causing a flow velocity meter to detect flow velocity value and flow direction of the gas including the plurality of particles in a vicinity of the processing object,
- causing an arithmetic part to determine generation of a vortex based on flow velocity value and flow direction of the gas including the plurality of particles from the flow velocity meter and predetermine a steady state of flow velocity value and flow direction of the gas including the plurality of particles, and
- causing the supplier to stop the supply of the plurality of particles when the arithmetic part determines that the vortex is generated.
Dependencies are inferred from the claim text.