Method for manufacturing vibrator device

A method for manufacturing a vibrator device including

• a first vibrating arm and a second vibrating arm extending along a first direction and arranged side by side along a second direction that intersects with the first direction,
• the first vibrating arm and the second vibrating arm each having a first surface and a second surface in a front-back relationship with the first surface and arranged side by side in a third direction that intersects with the first and second directions, a bottomed first groove that opens on the first surface, a bottomed second groove that opens on the second surface, and a side surface that connects the first surface and the second surface to each other,
• the method comprising:
• a preparation step of preparing a quartz crystal substrate having the first surface and the second surface;
• a first dry etching step of dry-etching the quartz crystal substrate from the first surface side to form the first grooves and part of outer shapes of the first vibrating arm and the second vibrating arm;
• a second dry etching step of dry-etching the quartz crystal substrate from the second surface side to form the second grooves and part of the outer shapes of the first vibrating arm and the second vibrating arm;
• and
• a wet etching step of wet-etching the side surfaces of the first and second vibrating arms.