Semiconductor optical device having distributed feed-back type laser and electroabsorption-type modulator
AssigneeSumitomo Electric Industries, Ltd.
InventorsYuki Ito, Mitsuru Ekawa
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AssigneeSumitomo Electric Industries, Ltd.
InventorsYuki Ito, Mitsuru Ekawa
Estimating the term…
A semiconductor optical device, in which a light emitting region and a modulator region are integrated, includes a first mesa disposed in the light emitting region, protruding in a direction that intersects a light propagation direction, and including an active layer, first and second buried layers disposed on the first mesa in a direction that intersects the light propagation direction and sequentially stacked in a direction in which the first mesa protrudes, a first semiconductor layer disposed on the first mesa and the second buried layer, a second mesa disposed in the modulator region and including a light absorption layer, and a third buried layer disposed on the second mesa. The first semiconductor layer and the first buried layer each have a first conductivity type. The second buried layer has a second conductivity type different from the first conductivity type, and the third buried layer is a semi-insulating semiconductor layer.
A semiconductor optical device in which a light emitting region that emits light and a modulator region that modulates the light are integrated, the semiconductor optical device comprising:
A method of manufacturing a semiconductor optical device in which a light emitting region that emits light and a modulator region that modulates the light are integrated, the method comprising:
Dependencies are inferred from the claim text.