Device and method for moving an object into a processing station, conveying system and processing apparatus

A device for moving an object comprising at least a substrate (2) through an open side of a processing station (1a,b) of a processing apparatus, the device comprising:

• at least one support (26;26′), placeable at the processing station (1a,b);
• at least one carrier (27a,b;27′a,b), each guided for movement relative to the at least one support (26;26′) along a respective path predominantly directed in parallel to a reference axis (z) in a three-dimensional reference co-ordinate system;
• at least one controlling device (29a,b,30a,b,31a,b;37a,b) for controlling the movement of the at least one carrier (27a,b;27′a,b) and driving the movement in at least one of opposite directions along the respective path;
• a holding component (21;21′) for holding the object;
• and
• a suspension mechanism with which the holding component (21;21′) is connected to the at least one carrier (27a,b;27′a,b);
• wherein the suspension mechanism is arranged to guide movement of the holding component (21;21′) relative to the at least one carrier (27a,b;27′a,b) along a holding component (21;21′) path;
• and
• wherein the at least one controlling device (29a,b,30a,b,31a,b;37a,b) is arranged to drive the movement of the holding component (21;21′) in at least one direction along the holding component path, characterised in that
• the holding component path is predominantly directed in parallel to the reference axis (z).