US 12,204,184 B2 · Structure for an optoelectronics platform and method of fabricating a structure for an optoelectronics platform

Abstract

A structure for an optoelectronics platform and a method of fabricating a structure for an optoelectronics platform such as a Mach-Zehnder modulator or a waveguide. The method comprises the steps of providing a substrate, and depositing a BaTi03, BTO, film on a surface of the substrate and having a thickness suitable for single mode operation with one or more possible polarization configurations with optical confinement in the BTO film at a wavelength or wavelength range of operation; wherein the substrate is chosen to provide vertical refractive index confinement in a direction perpendicular to the surface of the substrate for the single mode operation optical confinement in the BTO film at the wavelength or wavelength range of operation.

Claims20

Dependent claims

A structure for an optoelectronics platform comprising:

a substrate, and
a BaTiO3 (BTO) film deposited on a surface of the substrate and having a thickness such that the BTO film is configured for single mode operation with one or more polarization configurations with optical confinement in the BTO film at a wavelength range of operation from about 400 nm to 1600 nm;
wherein the substrate provides vertical refractive index confinement in a direction perpendicular to the surface of the substrate for the single mode operation optical confinement in the BTO film at the wavelength range of operation;
and
wherein the substrate comprises one of a group consisting of La0.3Sr0.7Al0.65Ta0.35O3 (LSAT), LaSrAlO4 (LSAO), GdScO3, SmScO3, TbScO3, NdScO3, HoScO3, ErScO3, TmScO3, YbScO3, LuScO3, PrScO3, LaScO3, YScO3.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/440,077Filed 26 Mar 2020

Priority

SG 10201902663T26 Mar 2019

Published

US 2022/0365379 A117 Nov 2022

Granted

21 Jan 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification6 codes

G02F 1/035
Based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect: in an optical waveguide structure
G02F 1/0136
For the control of the intensity, phase, polarisation or colour: for the control of polarisation, e.g. state of polarisation [SOP] control,…
G02F 1/05
Based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect: with ferro-electric properties
G02F 1/355
Non-linear optics: characterised by the materials used

Structure for an optoelectronics platform and method of fabricating a structure for an optoelectronics platform

Life of this patent

Structure for an optoelectronics platform and method of fabricating a structure for an optoelectronics platform

Life of this patent

Abstract

Claims20