Active anti-vibration system for a precision motion system

Abstract

An active anti-vibration system includes a mounting base having an upper side onto which a motion system is mountable and a lower side, a supporting frame resting on the floor, and active bearings mounted into an active bearings compartment defined by the lower side of the mounting base and an upper side of the supporting frame. Each active bearing includes actuators for imparting counteracting forces to compensate for reactions forces generated by the motion system, when mounted onto the mounting base and operating, to avoid unwanted movements of the mounting base and dampen any residual movements. Each active bearing further includes an upper panel mounted against the lower side of the mounting base, and a lower panel mounted against the upper side of the supporting frame. The mounting base includes through-holes extending from the upper side to the lower side of the mounting base, and a first set of fixation elements mounted inside respective through-holes to secure the active bearing upper panel to the lower side of the mounting base. The active bearings include a second set of fixation elements to secure the active bearing lower panel to the upper side of the supporting frame.

Dependencies are inferred from the claim text.