Microelectromechanical systems (MEMS) switch and related methods
AssigneeAnalog Devices International Unlimited Company
InventorsPadraig Fitzgerald, Michael James Twohig, James Lee Lampen, Philip James Brennan
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Abstract
Microelectromechanical systems (MEMS) switches are disclosed. The MEMS switch may have an actuation voltage greater than the expected voltage of a signal being passed by the MEMS switch in normal operation. The MEMS switches may include a distributed hinge structure in some embodiments. Radial contact pads are included in some embodiments, with or separate from the distributed hinge.
Claims20
A microelectromechanical systems (MEMS) switch, comprising:
- a substrate;
- an anchor coupled to the substrate;
- a beam coupled to the anchor by a plurality of hinges and suspended above the substrate;
- and
- a plurality of electrodes disposed on the substrate and including a first electrode configured to receive an actuation voltage and a second electrode configured to apply a signal to the beam, the actuation voltage being greater than a maximum voltage of the signal applied to the beam.
A method of operating a microelectromechanical systems (MEMS) switch, comprising:
- applying a signal to a beam of the MEMS switch;
- and
- applying an actuation voltage to a first electrode on a substrate underlying the beam of the MEMS switch, wherein the actuation voltage is at least twice as large as a maximum voltage of the signal applied to the beam.
A microelectromechanical systems (MEMS) teeter-totter switch, comprising:
- a substrate;
- an anchor;
- a beam suspended above the substrate, coupled to the anchor and configured to pivot about the anchor, wherein the anchor comprises four or more substantially parallel tethers attached to the beam;
- a contact pad on the substrate;
- a radially symmetric metallization on the contact pad;
- and
- a plurality of electrodes disposed on the substrate and including a first electrode configured to receive an actuation voltage and a second electrode configured to apply a signal to the beam, the actuation voltage being greater than a maximum voltage of the signal applied to the beam.
Dependencies are inferred from the claim text.