Apparatus of supporting debonding and method for debonding using the same
AssigneeCorning Incorporated
InventorsBokyung Kong, Kyungwook Park
Life of this patent
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Abstract
A debonding support device includes a suction plate including a support region for supporting a glass assembly, the support region including at least two suction regions applying different suction forces per unit area, the suction regions including a debonding initiation portion suction region for sucking a debonding initiation portion at which debonding of the glass assembly is to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area; a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and a controller.
Claims10
A debonding method comprising:
- aligning a glass assembly, which comprises a sheet of ultrathin glass and a sheet of carrier glass bonded to each other, on a support region of a suction plate of a debonding support device such that the sheet of ultrathin glass faces and is in direct contact with the support region;
- wherein the debonding support device comprises:
- the suction plate comprising the support region for supporting the glass assembly, the support region comprising at least two suction regions applying different suction forces per unit area, the at least two suction regions comprising a debonding initiation portion suction region for sucking a debonding initiation portion of the glass assembly at which debonding of the glass assembly is configured to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area;
- a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and
- a controller configured to control the vacuum pump to adjust the vacuum pressure;
- providing the vacuum pressure to the suction plate to support and suck the glass assembly;
- initiating debonding by advancing a debonding starter into a space between the suction plate and the sheet of carrier glass;
- and
- debonding the sheet of carrier glass from the sheet of ultrathin glass over the entire support region.
A debonding method comprising:
- aligning a glass assembly, which comprises a sheet of ultrathin glass and a sheet of carrier glass bonded to each other, on a support region of a suction plate of a debonding support device such that the sheet of ultrathin glass faces the support region;
- wherein the debonding support device comprises:
- the suction plate comprising the support region for supporting the glass assembly, the support region comprising at least three suction regions applying different suction forces per unit area, the at least three suction regions comprising a debonding initiation portion suction region for sucking a debonding initiation portion of the glass assembly at which debonding of the glass assembly is configured to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area;
- a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and
- a controller configured to control the vacuum pump to adjust the vacuum pressure;
- providing the vacuum pressure to the suction plate to support and suck the glass assembly;
- initiating debonding by advancing a debonding starter into a space between the suction plate and the sheet of carrier glass;
- and
- debonding the sheet of carrier glass from the sheet of ultrathin glass over the entire support region.
Dependencies are inferred from the claim text.