US 12,201,026 B2 · Low frequency vibrating actuator device and low frequency vibrating actuator apparatus including the same

Abstract

Provided is a low frequency vibrating actuator device including an actuator configured to generate a vibration by receiving a voltage, a spring structure disposed on the actuator, and a vibrating mass part disposed on the spring structure. Here, the spring structure includes a first thin-film, a first spacer disposed between the first thin-film and the actuator, and a second spacer disposed between the first thin-film and the vibrating mass part. Also, the first spacer and the second spacer are horizontally offset from each other.

Claims20

Dependent claims

A low frequency vibrating actuator device comprising:

an actuator configured to generate a vibration by receiving a voltage;
a spring structure disposed on the actuator;
and
a vibrating mass part disposed on the spring structure,
wherein the spring structure comprises:
a first thin-film;
a first spacer disposed between the first thin-film and the actuator;
and
a second spacer disposed between the first thin-film and the vibrating mass part,
wherein the first spacer and the second spacer are horizontally offset from each other.

7 more elements

A low frequency vibrating actuator apparatus comprising:

a substrate;
and
at least one low frequency vibrating actuator device disposed on the substrate,
wherein the low frequency vibrating actuator device comprises:
an actuator configured to generate a vibration by receiving a voltage;
a first spring structure disposed on the actuator;
and
a vibrating mass part disposed on the first spring structure,
wherein the first spring structure comprises:
a first thin-film;
a first spacer disposed between the first thin-film and the actuator;
and
a second spacer disposed between the first thin-film and the vibrating mass part,
wherein the first spacer and the second spacer are horizontally offset from each other.

11 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/493,120Filed 4 Oct 2021

Priority

KR 10-2020-015107012 Nov 2020

Published

US 2022/0149265 A112 May 2022

Granted

14 Jan 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification8 codes

H10N 30/2044
Cantilevers, i.e. having one fixed end: having multiple segments mechanically connected in series, e.g. zig-zag type
H10N 30/20
Piezoelectric or electrostrictive devices: with electrical input and mechanical output, e.g. functioning as actuators or vibrators
H10N 30/50
Piezoelectric or electrostrictive devices: having a stacked or multilayer structure
H10N 30/704
Piezoelectric or electrostrictive devices: based on piezoelectric or electrostrictive films or coatings

Low frequency vibrating actuator device and low frequency vibrating actuator apparatus including the same

Life of this patent

Low frequency vibrating actuator device and low frequency vibrating actuator apparatus including the same

Life of this patent

Abstract

Claims20