Epitaxial structure and transistor including the same
AssigneeXiamen Sanan Integrated Circuit Co., Ltd.
InventorsChih-Hung Yen, Wenbi Cai, Houng-Chi Wei
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Abstract
An epitaxial structure includes a composite base unit and an emitter unit. The composite base unit includes a first base layer and a second base layer formed on the first base layer. The first base layer is made of a material of InxGa(1-x)As(1-y)Ny, in which 0<x≤0.2, and 0≤y≤0.035, and when y is not 0, x=3y. The second base layer is made of a material InmGa(1-m)As, in which 0.03≤m≤0.2. The emitter unit is formed on the second base layer 12 opposite to the first base layer 11, and is made of an indium gallium phosphide-based material. A transistor including the epitaxial structure is also disclosed.
Claims20
An epitaxial structure, comprising:
- a composite base unit including
- at least one first base layer made of a material InxGa(1-x)As(1-y)Ny, wherein 0<x≤0.2, and 0≤y≤0.035, and when y is not 0, x=3y, and
- at least one second base layer formed on said at least one first base layer, and made of InGaAs.
Dependencies are inferred from the claim text.