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US 12,199,006 B2Granted
Bonded body, power module substrate, power module, method for manufacturing bonded body, and method for manufacturing power module substrate
AssigneeMitsubishi Materials Corporation
InventorsNobuyuki Terasaki, Yoshiyuki Nagatomo
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Abstract
A bonded body of the present invention includes a ceramic member formed of ceramics and a Cu member formed of Cu or a Cu alloy. In a bonding layer formed between the ceramic member and the Cu member, an area ratio of a Cu3P phase in a region extending by up to 50 μm toward the Cu member side from a bonding surface of the ceramic member is equal to or lower than 15%.
Claims4
A method for manufacturing a bonded body including a ceramic member formed of ceramics and a Cu member formed of Cu or a Cu alloy, the method comprising:
- a laminating step of laminating the ceramic member and the Cu member through a Cu—P based brazing material and a Ti material;
- and
- a heat treatment step of performing heating at a temperature equal to or higher than a melting start temperature of the Cu—P-based brazing material so as to generate a liquid phase,
- wherein the Cu—P based brazing material contains:
- P of 3 mass % or more and 10 mass % or less;
- optionally Sn of 0.5 mass % or more and 25 mass % or less;
- optionally at least one of elements among Ni, Cr, Fe, and Mn of 2 mass % or more and 20 mass % or less;
- and
- a balance of Cu,
- the Ti material contains Ti,
- in the laminating step, the Cu—P-based brazing material and the Ti material are disposed such that an atomic ratio [Ti/P] of Ti to P interposed between the ceramic member and the Cu member falls into a range equal to or higher than 0.1 and equal to or lower than 0.8, and
- in the heat treatment step, a heating rate is within a range equal to or higher than 5° C./min and equal to or lower than 30° C./min.
9 more elements
Dependencies are inferred from the claim text.