Substrate storage apparatus provided with storage environment detection
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh, Yun-Zi Lin
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Abstract
The invention discloses a substrate storage apparatus having a detecting device detachably connecting to an outer pod. The detecting device includes a sensing member having a sensing terminal, a cavity and a sensor. The sensing terminal detachably connects to the outer pod such that the sensing terminal exposes in an accommodating space inside of the outer pod. The cavity receiving the sensor extends to an outside of the outer pod and the accommodating space. The cavity communicates with the accommodating space through the sensing terminal, allowing the sensor to read information regarding the accommodating space.
Claims16
A substrate storage apparatus, having an outer pod accommodating an inner pod and a detection device detachably connected to the outer pod, the inner pod used for accommodating a substrate, the detection device comprising:
- a sensing member, having a sensing terminal provided on an inside of the outer pod and a connecting terminal provided on an outside of the outer pod, the sensing terminal and the connecting terminal detachably connected to each other such that the sensing member is detachably mounted to the outer pod, the sensing terminal having a cavity and a sensor received in the cavity, when the sensing member connected to the outer pod the sensing terminal is exposed in an accommodating space on the inside of the outer pod, the cavity is in flow communication with the accommodating space of the outer pod through the sensing terminal, thereby allowing the sensor to read information associated with the accommodating space.
A substrate storage apparatus, having an outer pod accommodating an inner pod and a detection device detachably connected to the outer pod, the inner pod used for accommodating a substrate, the detection device comprising:
- a sensing member, having a sensing terminal, a cavity and a sensor, the sensing member detachably connected to the outer pod such that the sensing terminal is exposed in an accommodating space on an inside of the outer pod, the cavity extending between an outside of the outer pod and the accommodating space and accommodates the sensor, the cavity being in flow communication with the accommodating space of the outer pod through the sensing terminal, thereby allowing the sensor to read information associated with the accommodating space;
- wherein the sensing member comprises an outer shell and an inner shell, the outer shell and the inner shell are mutually detachably connected to the cavity and define the cavity, the outer shell is provided with the connection terminal exposed on the outside of the outer pod, and the inner shell is provided with the sensing terminal exposed in the accommodating space of the outer pod.
Dependencies are inferred from the claim text.