Semiconductor apparatus and magnetic structure of semiconductor apparatus

A semiconductor apparatus comprising:

• a reaction chamber;
• and
• a magnetic structure arranged around outside of the reaction chamber and including:
• an annular support member arranged around the reaction chamber of the semiconductor apparatus;
• a plurality of angle adjustment assemblies connected to the annular support member and distributed along a circumferential direction of the annular support member;
• and
• a plurality of magnetic members connected to the plurality of angle adjustment assemblies in a one-to-one correspondence, an angle adjustment assembly of the angle adjustment assemblies being configured to fix a corresponding magnetic member of the plurality of magnetic members at the annular support member and adjust a magnetic field line direction of the magnetic member and a magnitude of an included angle between a magnetic field line of the magnetic member and an axis of the reaction chamber;
• wherein an angle adjustment assembly of the plurality of angle adjustment assemblies includes:
• a support body including a plurality of first mounting holes along a circumferential direction, and a second mounting hole at the annular support member, and
• a first fastener being placed in any one of the first mounting holes and the second mounting hole to adjust the magnetic field line direction of the magnetic member and the magnitude of the included angle between the magnetic field line of the magnetic member and the axis of the reaction chamber.