Target and film forming apparatus
AssigneeJsw Afty Corporation
InventorHironori Torii
Life of this patent
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Abstract
A film forming apparatus 1 includes a target TA, a ring-shaped shield member 30 provided between the target TA and a plasma generation unit, and a ring-shaped shield member 40 provided between the target TA and a workpiece holding unit. The target TA includes a cylindrical target member 21 and a backing tube (supporting member) 20 configured to support the target member 21. Each of the shield member 30, the shield member 40, and the target member 21 is stacked in a Z direction around an axis VL1 as a central axis extending in the Z direction, each of the shield member 30, the target member 21, and the shield member 40 is arranged so as to be separated from each other in the Z direction, and an inner diameter D1 of the shield member 30 is smaller than an inner diameter D2 of the target member 21.
Claims7
A film forming apparatus comprising:
- a workpiece holding unit configured to hold a film formation object;
- a plasma generation unit configured to generate plasma;
- a target provided between the workpiece holding unit and the plasma generation unit;
- a ring-shaped first shield member provided between the target and the plasma generation unit;
- and
- a ring-shaped second shield member provided between the target and the workpiece holding unit,
- wherein the target includes:
- a cylindrical target member;
- and
- a supporting member arranged around the target member and configured to support the target member,
- wherein each of the first shield member, the second shield member, and the target member is stacked in a first direction around a first axis as a central axis extending in the first direction,
- wherein each of the first shield member, the target member, and the second shield member is arranged so as to be separated from each other in the first direction,
- wherein an inner diameter of the first shield member is smaller than an inner diameter of the target member,
- wherein the first shield member has a first portion overlapping the supporting member of the target in the first direction and a second portion not overlapping the target in the first direction,
- wherein a thickness of the second portion is smaller than a thickness of the first portion, and
- wherein, when a surface of the target member including a surface facing the first shield member is defined as a reference surface, a shortest distance from the second portion to the reference surface is larger than a shortest distance from the first portion to the reference surface.
Dependencies are inferred from the claim text.