Sample holder and charged particle beam apparatus
AssigneeHitachi High-Tech Corporation
InventorsShigeru Haneda, Junzo Azuma
Life of this patent
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Abstract
A sample holder HL capable of efficiently applying a pressure to an observation surface of a sample SAM is provided. The sample holder HL includes a fixed electrode 4b, a movable electrode 5, and a pressure applying member 6 attached to the movable electrode 5 and having a function to move the movable electrode 5 in a horizontal direction. When the sample SAM is held between a side surface of the fixed electrode 4b and a side surface of the movable electrode 5, an upper surface of the sample SAM is located within a range of a width of the pressure applying member 6 at a position where the pressure applying member 6 is in contact with the movable electrode 5 in the Z direction.
Claims15
A sample holder used for a charged particle beam apparatus, the sample holder comprising:
- a first electrode having a first side surface;
- a second electrode having a second side surface facing the first side surface;
- and
- a pressure applying member attached to the first electrode and having a function to move the first electrode in a horizontal direction,
- wherein when a sample is held between the first side surface and the second side surface, an upper surface of the sample can be located within a range of a first width of the pressure applying member at a position where the pressure applying member is in contact with the first electrode, in a height direction orthogonal to the horizontal direction.
A sample holder used for a charged particle beam apparatus, the sample holder comprising:
- a first electrode having a first side surface;
- a second electrode having a second side surface facing the first side surface;
- and
- a pressure applying member attached to the first electrode and having a function to move the first electrode in a horizontal direction,
- wherein a jig is provided on the first side surface or the second side surface, and
- wherein a lower surface of the jig is located within a range of a first width of the pressure applying member at a position where the pressure applying member is in contact with the first electrode, in a height direction orthogonal to the horizontal direction.
Dependencies are inferred from the claim text.