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US 12,198,741 B2Granted
Apparatus and method for forming an overcoat
AssigneeNanyang Technological University
InventorsRajdeep Singh Rawat, Choon Keat Paul Lee, Joseph Vimal Vas, Mayank Mishra, S. N. Piramanayagam
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Abstract
Disclosed is an apparatus and method for forming a magnetic recording medium having a recording layer with a plurality of perpendicular magnetic domains configured to store data; and a carbon overcoat formed on the recording layer. The carbon overcoat is characterized by a sp3 carbon content greater than 70%, and a thickness of less than 1.2 nm.
Claims20
A magnetic recording medium, comprising:
- a recording layer having a plurality of perpendicular magnetic domains configured to store data;
- and
- a carbon overcoat formed on the recording layer, wherein the carbon overcoat is characterized by a sp3 carbon content greater than 70%, and wherein the carbon overcoat is less than 1.2 nm in thickness.
A method comprising:
- forming a carbon overcoat on a deposition surface by a dense plasma focus process configured to deliver one or more shots of plasma from a gaseous source of carbon, the carbon overcoat being characterized by a sp3 content greater than 70%, wherein each of the one or more shots of plasma forms a thickness of less than 1.2 nm per shot of the carbon overcoat.
An apparatus comprising:
- a chamber configured to receive a gaseous precursor in an inert gas;
- a cathode;
- a coaxial anode having an end;
- a charging/discharging circuit configured to provide a charge between the anode and the cathode to form a shot of plasma;
- and
- a support configured to support a deposition surface in the chamber such that the deposition surface is spaced apart from the end of the coaxial anode by a deposition distance, wherein the apparatus in operation is configured to provide the shot of plasma to form an overcoat on the deposition surface, and wherein the overcoat is less than 1.2 nm in thickness.
3 more elements
Dependencies are inferred from the claim text.