Motorized chuck stage controlling method

A motorized chuck stage controlling method adapted to a wafer probing device, wherein the wafer probing device comprises a control rod and a motorized chuck stage, the control rod is movable between an upper limit position and a lower limit position, and the motorized chuck stage is moved along a Z-axis direction in response to a movement of the control rod;

• the motorized chuck stage controlling method comprises:
• under a first operation state, controlling the motorized chuck stage to be at a first top position when the control rod is at the lower limit position, controlling the motorized chuck stage to be at a first bottom position when the control rod is at the upper limit position, and controlling the motorized chuck stage to be moved between the first top position and the first lower portion correspondingly when the control rod is moved between the lower limit position and the upper limit position;
• receiving a setting command, switching from the first operation state to a setting state according to the setting command, and executing following steps:
• controlling the motorized chuck stage to stop moving in response to a movement of the control rod;
• detecting a current control rod position of the control rod and a current motorized chuck stage position of the motorized chuck stage;
• and
• detecting whether the control rod is already moved from the current control rod position to the lower limit position, and setting the current motorized chuck stage position as a second top position of the motorized chuck stage when the control rod is already moved from the current control rod position to the lower limit position;
• switching from the setting state to a second operation state, wherein under the second operation state, the motorized chuck stage is controlled to be at the second top position when the control rod is at the lower limit position;
• displaying a graphical user interface on a display, wherein the graphical user interface comprises a setting button;
• and
• generating the setting command according to a click event occurred to the setting button;
• wherein when the control rod is at the lower limit position, invalidating the click event occurred to the setting button so as not to generate the setting command.

A motorized chuck stage controlling method adapted to a wafer probing device, wherein the wafer probing device comprises a control rod and a motorized chuck stage, the control rod is movable between an upper limit position and a lower limit position, and the motorized chuck stage is moved along a Z-axis direction in response to a movement of the control rod;

• the motorized chuck stage controlling method comprises:
• under a first operation state, controlling the motorized chuck stage to be at a first top position when the control rod is at the lower limit position, controlling the motorized chuck stage to be at a first bottom position when the control rod is at the upper limit position, and controlling the motorized chuck stage to be moved between the first top position and the first lower portion correspondingly when the control rod is moved between the lower limit position and the upper limit position;
• receiving a setting command, switching from the first operation state to a setting state according to the setting command, and executing following steps:
• controlling the motorized chuck stage to stop moving in response to a movement of the control rod;
• detecting a current control rod position of the control rod and a current motorized chuck stage position of the motorized chuck stage;
• calculating an offset distance of a current motorized chuck stage position of the motorized chuck stage with respect to the first top position;
• and
• controlling the motorized chuck stage to be moved downwardly by the offset distance from the current motorized chuck stage position so as to arrive at an intermediate position;
• and
• switching from the setting state to a second operation state, wherein under the second operation state, the motorized chuck stage is controlled to be moved upwardly by the offset distance from the intermediate position correspondingly when the control rod is moved downwardly from the current control rod position to the lower limit position
• wherein when the control rod is at the lower limit position, invalidating the setting command after receiving the setting command and before switching from the first operation state to the setting state.