Heat treatment apparatus and heat treatment method
AssigneeTokyo Electron Limited
InventorsKazuteru Obara, Tatsuya Yamaguchi
Life of this patent
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Abstract
A heat treatment apparatus including: a cylindrical processing container; a heater configured to heat the processing container; and a cooler configured to cool the processing container, wherein the cooler includes: discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container; a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes; and blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths.
Claims15
A heat treatment apparatus comprising:
- a cylindrical processing container;
- a heater configured to heat the processing container;
- and
- a cooler configured to cool the processing container,
- wherein the cooler includes:
- discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container;
- a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes;
- and
- blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths, and
- wherein the branch includes a plurality of branch chambers provided in multiple stages.
A heat treatment method in a heat treatment apparatus, the heat treatment apparatus including:
- a heater configured to heat a cylindrical processing container;
- and
- a cooler configured to cool the processing container,
- wherein the cooler includes:
- discharge holes provided at intervals in a longitudinal direction of the processing container, the discharge holes being configured to discharge a cooling medium toward the processing container;
- a branch configured to divide the cooling medium into a plurality of flowing paths that communicate with the discharge holes;
- and
- blowers provided for respective ones of the flowing paths, the blowers being configured to send the cooling medium to the discharge holes that communicate with the respective ones of the flowing paths, and
- wherein the branch includes a plurality of branch chambers provided in multiple stages,
- wherein when a heat treatment is performed in the processing container, the respective ones of the blowers are independently controlled according to a condition of the heat treatment.
Dependencies are inferred from the claim text.