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US 12,196,368 B2Granted
Storage and delivery veseel for storing GeH4, using a zeolitic adsorbent
AssigneeEntegris, Inc.
InventorOleg Byl
Life of this patent
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Abstract
Described are storage and dispensing systems and related methods, for the selective dispensing germane (GeH4) as a reagent gas from a vessel in which the germane is held in sorptive relationship to a solid adsorbent medium that includes a zeolitic imidazolate framework.
Claims17
A storage and dispensing vessel enclosing an interior volume that contains zeolitic imidazolate framework adsorbent, and GeH4 adsorbed on the adsorbent, the vessel comprising:
- a port;
- a valve mounted at the port;
- zeolitic imidazolate framework adsorbent within the interior volume;
- and
- GeH4 adsorbed on the zeolitic imidazolate framework;
- the vessel being selectively actuatable to flow gaseous GeH4 from the interior volume of the vessel, through the valve, for discharge of the GeH4 from the vessel;
- and
- wherein the amount of degradation of GeH4 to hydrogen gas (H2) is less than 1 percent of total initial adsorbed germane, over a period of 365 days, at 30 degrees Celsius;
- and
- a storage capacity for the GeH4 of at least 100 g/kg.
7 more elements
Dependencies are inferred from the claim text.