Treatment machine, drive unit for a treatment machine and use of the treatment machine

A treatment machine comprising:

• a chamber the treatment of one substrate or a plurality of substrates,
• a rotatably supported temperature-controlled shaft, wherein said shaft defines a cylindrical, gas-tight hollow space,
• a heating arrangement for electrically heating at least a part of the shaft arranged in the chamber, wherein said heating arrangement comprises an accommodation mandrel for accommodating at least one electrical heating element, said accommodation mandrel being arranged in a non-rotating manner and extending into the hollow space of the shaft, wherein an outer surface of the accommodation mandrel is spaced apart from an inner surface of the shaft by a gap, and
• a gaseous medium disposed in the gap between the outer surface of the accommodation mandrel and the inner surface of the shaft.

A treatment machine comprising:

• a chamber for treatment of one substrate or a plurality of substrates,
• a rotatably supported temperature-controlled shaft, wherein said shaft defines a cylindrical, gas-tight hollow space,
• a plurality of support elements disposed around the shaft and configured to support a lower side of the one substrate or the plurality of substrates and provide a separation between the shaft and the one substrate or the plurality of substrates, and
• a heating arrangement for electrically heating at least a part of the shaft arranged in the chamber,
• wherein said heating arrangement comprises an accommodation mandrel for accommodating at least one electrical heating element, said accommodation mandrel being arranged in a non-rotating manner and extending into the hollow space of the shaft,
• wherein an outer surface of the accommodation mandrel is spaced apart from an inner surface of the shaft by a gap.