Fabrication of PBSE nanostructures by employing chemical bath deposition (CBD) for photonics applications
AssigneeIllinois Tool Works Inc.
InventorsRichard S. Kim, Jeung Hun Park
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Abstract
Methods and systems are provided for a homogenous, single crystal, electrically conductive, and narrow bandgap PbSe nanostructure is synthesized using a chemical bath deposition on, for example, quartz substrates, and includes a tunable iodine doping process to select the size and/or shape of the nanostructures. The single crystalline PbSe nanostructure can be exposed following an isolation process (e.g., etching process), and the concentration and/or distribution of iodine across multiple PbSe nanostructures (e.g., on a quartz substrate) can be adjusted during post processing steps, including heat treatments.
Claims19
A method of forming a single crystalline lead selenide (PbSe) nanostructure, comprising:
- preparing a substrate;
- preparing chemical lead and selenium precursors;
- depositing the precursors to the substrate via a chemical bath deposition (CBD) process, resulting in a thin film comprising a PbSe alloy;
- vacuum baking the thin film at a temperature above 100° C. to get rid of residual solvent;
- exposing the thin film to an oxygenated gas to induce re-crystallization and produce an oxide passivation layer;
- doping the thin film with a vapor comprising a predetermined concentration of iodine for a predetermined time period;
- applying nanostructure isolation techniques using a chemical etchant or an electrochemical etching process to the thin film to uncover a single crystalline PbSe nanostructure underlying the oxide passivation layer and polycrystalline PbSe;
- and
- post processing the thin film with the uncovered single crystalline PbSe to redistribute iodine to the PbSe nanostructure.
Dependencies are inferred from the claim text.