Plating membrane
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Hsiang Chen, Hung-San Lu, Ting-Ying Wu, Chuang Chihchous, Yu-Lung Yeh
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Hsiang Chen, Hung-San Lu, Ting-Ying Wu, Chuang Chihchous, Yu-Lung Yeh
Estimating the term…
A plating membrane includes a support structure extending radially outward from a nozzle that is to direct a flow of a plating solution toward a wafer. The plating membrane also includes a frame, supported by the support structure, having an inner wall that is angled outward from the nozzle. The outward angle of the inner wall relative to the nozzle directs a flow of plating solution from the nozzle in a manner that increases uniformity of the flow of the plating solution toward the wafer, reduces the amount of plating solution that is redirected inward toward the center of the plating membrane, reduces plating material voids in trenches of the wafer (e.g., high aspect ratio trenches), and/or the like.
A plating membrane, comprising:
A plating membrane, comprising:
A plating tool, comprising:
Dependencies are inferred from the claim text.