Spatial light modulator (SLM) comprising integrated digital-to-analog converters

An arrangement for controlling micromechanical actuators, comprising the following features:

• a digital-to-analog converter;
• and
• a plurality of micromechanical actuators;
• wherein
• the micromechanical actuators are coupled to a connecting structure;
• wherein
• the digital-to-analog converter is configured to provide a voltage to be applied to the connecting structure by an adjustable capacitive voltage division that is dependent on a digital input value of the digital-to-analog converter, wherein
• the digital-to-analog converter is configured to directly incorporate a capacitance of the connecting structure into the capacitive voltage division;
• wherein
• the connecting structure comprises a connecting line and a plurality of switching transistors connected between the connecting line and storage capacitors associated with the respective micromechanical actuators;
• wherein
• a first portion of the actuators in an actuator column are coupled to a first column line, and wherein
• a second portion of the actuators in the actuator column are coupled to a second column line, wherein
• the arrangement is configured to alternately couple the first column line and the second column line to switched capacitors of the digital-to-analog converter or to simultaneously couple them to two different digital-to-analog converters;
• and wherein
• the arrangement comprises a plurality of connecting structures, wherein
• in an initialization phase associated with providing an analog value on the first connecting structure, at least a first one of the connecting structures is precharged to a potential that is below a target potential for the first connecting structure;
• in an initialization phase associated with providing an analog value on the second connecting structure, at least a second one of the connecting structures is precharged to a potential that is above a target potential for the second connecting structure;
• wherein
• after completion of the initialization phase associated with providing an analog value on the first connecting structure, the second terminals of the capacitors are connected to corresponding reference potential lines in a data-dependent manner so as to raise the potential of the first connecting structure to a target potential for the first connecting structure;
• wherein
• after completion of the initialization phase associated with providing an analog value on the second connecting structure, the second terminals of the capacitors are connected to corresponding reference potential lines in a data-dependent manner to decrease the potential of the first connecting structure to a target potential for the second connecting structure.

A method of controlling micromechanical actuators in an arrangement comprising a digital-to-analog converter and a plurality of micromechanical actuators coupled to a connecting structure, wherein

• a voltage present at the connecting structure is determined by an adjustable capacitive voltage division that is dependent on a digital input value, wherein
• the digital-to-analog converter is configured to provide a voltage to be applied to the connecting structure by an adjustable capacitive voltage division that is dependent on a digital input value of the digital-to-analog converter, wherein
• the digital-to-analog converter is configured to directly incorporate a capacitance of the connecting structure into the capacitive voltage division;
• wherein
• the connecting structure comprises a connecting line and a plurality of switching transistors connected between the connecting line and storage capacitors associated with the respective micromechanical actuators;
• wherein
• the connecting line is passively coupled to a plurality of capacitors that serve to provide adjustable voltage division;
• wherein
• the digital-to-analog converter comprises a first group of the capacitors whose first terminals are DC-coupled and whose second terminals are alternatively connected to one of at least two different reference potentials, as a function of a digital value;
• wherein
• the digital-to-analog converter comprises a second group of the capacitors whose first terminals are DC-coupled and whose second terminals are alternatively connected to one of the at least two different reference potentials, as a function of a digital value;
• wherein
• the first terminals of the first group of the capacitors are DC-coupled to the connecting structure;
• and wherein
• the first terminals of the second group of the capacitors are coupled to the first terminals of the first group of the capacitors via a first coupling capacitor.

A non-transitory digital storage medium having a computer program stored thereon to perform the method of controlling micromechanical actuators in an arrangement comprising a digital-to-analog converter and a plurality of micromechanical actuators coupled to a connecting structure, wherein:

• a voltage present at the connecting structure is determined by an adjustable capacitive voltage division that is dependent on a digital input value, wherein
• the digital-to-analog converter is configured to provide a voltage to be applied to the connecting structure by an adjustable capacitive voltage division that is dependent on a digital input value of the digital-to-analog converter, wherein
• the digital-to-analog converter is configured to directly incorporate a capacitance of the connecting structure into the capacitive voltage division;
• wherein
• the connecting structure comprises a connecting line and a plurality of switching transistors connected between the connecting line and storage capacitors associated with the respective micromechanical actuators;
• wherein
• the connecting line is passively coupled to a plurality of capacitors that serve to provide adjustable voltage division;
• wherein
• the digital-to-analog converter comprises a first group of the capacitors whose first terminals are DC-coupled and whose second terminals are alternatively connected to one of at least two different reference potentials, as a function of the digital input value;
• wherein
• the digital-to-analog converter comprises a second group of the capacitors whose first terminals are DC-coupled and whose second terminals are alternatively connected to one of the at least two different reference potentials, as a function of the digital input value;
• wherein
• the first terminals of the first group of the capacitors are DC-coupled to the connecting structure;
• and wherein
• the first terminals of the second group of the capacitors are coupled to the first terminals of the first group of the capacitors via a first coupling capacitor
• when said computer program is run by a computer.