Micro-electromechanical transducer with suspended mass

Abstract

The present invention relates to a micro-electromechanical transducer comprising a pressure detection arrangement and a sub-assembly adapted to cooperate with the pressure detection arrangement via a coupling volume, said sub-assembly comprising one or more moveable masses, a suspension member suspending a number of moveable masses, wherein the coupling volume is at least partly defined by the suspension member, and wherein the coupling volume is acoustically connected to an interior volume of the pressure detection arrangement, and wherein the suspension member comprises a viscoelastic material with a predetermined viscous and sealant behaviour in order to dampen one or more resonance peaks of the micro-electromechanical transducer and acoustically seal the coupling volume. The present invention further relates to a hearing device comprising such a micro-electromechanical transducer.

Dependencies are inferred from the claim text.