Cathode exchange mechanism to improve preventative maintenance time for cluster system
AssigneeApplied Materials, Inc.
InventorsBhaskar Prasad, Kirankumar Neelasandra Savandaiah, Thomas Brezoczky, Srinivasa Rao Yedla
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Abstract
A method and apparatus for lifting a process station from a processing module is described herein. The apparatus includes a lift assembly disposed on the processing module, a lift cage, and one or more guide pins. The lift assembly is disposed to be capable of reaching each of the process stations disposed within the processing module. The lift assembly is used for replacement and maintenance of the process stations and further enables the automated removal and placement of the process stations within the processing module. Maintenance methods enabled by the lift assembly are additionally disclosed herein.
Claims20
A lift assembly comprising:
- two or more support legs configured to be coupled to a processing module of a substrate processing system;
- a support bar extending between the two or more support legs, wherein the support bar comprises opposing ends that are each coupled to one of the two or more support legs;
- a first actuator coupled to the support bar and a first end of a first arm, wherein the first actuator has a first actuator rotational axis, and is configured to rotate the first arm about the first actuator rotational axis;
- a second actuator coupled to a second end of the first arm and a first end of a second arm, wherein the second actuator has a second actuator rotational axis, and is configured to rotate the second arm about the second actuator rotational axis;
- a lift actuator coupled to a second end of the second arm;
- and
- a lift clasp coupled to the lift actuator, the lift actuator comprising a bellows assembly configured to expand and contract to raise the lift clasp.
A substrate processing system comprising:
- a processing module defining a transfer region;
- a plurality of processing stations coupled to the processing module and disposed in an array around a central portion of the processing module;
- a lift assembly disposed on the processing module and between the plurality of processing stations comprising:
- two or more support legs coupled to the processing module;
- a support bar extending between the two or more support legs, wherein the support bar comprises opposing ends that are each coupled to the two or more support legs;
- a first actuator coupled to the support bar and a first end of a first arm, wherein the first actuator has a first actuator rotational axis, and is configured to rotate the first arm about the first actuator rotational axis;
- a second actuator coupled to a second end of the first arm and a first end of a second arm, wherein the second actuator has a second actuator rotational axis, and is configured to rotate the second arm about the second actuator rotational axis;
- a lift actuator coupled to a second end of the second arm;
- and
- a lift clasp coupled to the lift actuator, the lift actuator comprising a bellows assembly configured to expand and contract to raise the lift clasp.
A lift assembly comprising:
- two or more support legs configured to be coupled to a processing module of a substrate processing system;
- a support bar extending between the two or more support legs, wherein the support bar comprises opposing ends that are each coupled to one of the two or more support legs;
- a first actuator coupled to the support bar and a first end of a first arm, wherein the first actuator has a first actuator rotational axis, and is configured to rotate the first arm about the first actuator rotational axis;
- a second actuator coupled to a second end of the first arm and a first end of a second arm, wherein the second actuator has a second actuator rotational axis, and is configured to rotate the second arm about the second actuator rotational axis;
- a lift actuator coupled to a second end of the second arm;
- a lift clasp coupled to the lift actuator;
- and
- a plurality of first brackets disposed underneath the support bar, each of the first brackets coupling one of the support legs to the support bar.
Dependencies are inferred from the claim text.