Ultrasonic sensor, driving method thereof and manufacturing method thereof

An ultrasonic sensor, comprising a back plate, a sounding structure on the back plate, and a backing layer on a side of the sounding structure distal to the back plate;

• wherein
• the sounding structure comprises a plurality of emitting electrodes, an opposite electrode, a piezoelectric layer and a plurality of signal leads, and the plurality of emitting electrodes and the opposite electrode are respectively on two sides of the piezoelectric layer;
• and
• the plurality of emitting electrodes are in an array, and each emitting electrode of the plurality of emitting electrodes is individually coupled to one signal lead of the plurality of signal leads,
• wherein the backing layer and the opposite electrode are a unitary structure;
• and
• the ultrasonic sensor further comprises a plurality of receiving electrodes in an array on a side of the piezoelectric layer proximal to the back plate, and a plurality of receiving detection circuits electrically coupled to the plurality of receiving electrodes, wherein,
• each receiving detection circuit comprises a diode and a transistor for each receiving electrode, the transistor comprises an active layer, a first electrode and a second electrode, the diode comprises a third electrode and a fourth electrode, the first electrode and the second electrode of the transistor and the third electrode and the fourth electrode of the diode are made of a same material and are in a same layer, and a first insulating layer is between the first electrode and the second electrode of the transistor and the third electrode and the fourth electrode of the diode and the sounding structure;
• and
• the plurality of emitting electrodes are on a side of the plurality of receiving electrodes proximal to the back plate, a second insulating layer is between the plurality of receiving electrodes and the piezoelectric layer, and a sixth insulating layer is between the plurality of emitting electrodes and the plurality of receiving electrodes.